Patent Assignment Details
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| Reel/Frame: | 020472/0007 | |
| Pages: | 5 |
| | Recorded: | 02/06/2008 | | |
| Attorney Dkt #: | TTCA-260 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/16/2011
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Application #:
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12026913
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Filing Dt:
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02/06/2008
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Publication #:
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Pub Dt:
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08/06/2009
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Title:
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METHOD FOR ETCHING A SILICON-CONTAINING ARC LAYER TO REDUCE ROUGHNESS AND CD
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Assignee
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| TBS BROADCAST CENTER, 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-8481 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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4350 W. CHANDLER BLVD.
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SUITE 10
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CHANDLER, AZ 85226
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