Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 020480/0814 | |
| Pages: | 6 |
| | Recorded: | 02/07/2008 | | |
| Attorney Dkt #: | 8405 ETCH/DRIE |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/12/2010
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Application #:
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11974502
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Filing Dt:
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10/11/2007
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Publication #:
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Pub Dt:
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04/16/2009
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Title:
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TIME-BASED WAFER DE-CHUCKING FROM AN ELECTROSTATIC CHUCK HAVING SEPARATE RF BIAS AND DC CHUCKING ELECTRODES
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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P. O. BOX 450 A
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SANTA CLARA, CA 95052
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