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Reel/Frame:020481/0496   Pages: 4
Recorded: 02/08/2008
Attorney Dkt #:289955US
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
10578184
Filing Dt:
05/04/2006
Publication #:
Pub Dt:
06/21/2007
Title:
Plasma processing apparatus
Assignors
1
Exec Dt:
04/11/2006
2
Exec Dt:
04/11/2006
3
Exec Dt:
04/11/2006
4
Exec Dt:
04/11/2006
5
Exec Dt:
04/11/2006
Assignees
1
1-17-301, KOMEGAFUKURO 2-CHOME,, AOBA-KU, SENDAI-SHI
MIYAGI, JAPAN 980-0813
2
3-6, AKASAK 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-8481
Correspondence name and address
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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