Patent Assignment Details
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| Reel/Frame: | 020523/0711 | |
| Pages: | 3 |
| | Recorded: | 02/15/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11898990
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Filing Dt:
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09/18/2007
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Publication #:
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Pub Dt:
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06/12/2008
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Title:
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Two step cleaning process to remove resist, etch residue, and copper oxide from substrates having copper and low-K dielectric material
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Assignee
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| 2520 BARRINGTON COURT |
| HAYWARD, CALIFORNIA 94545-1163 |
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Correspondence name and address
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MORGAN, LEWIS & BOCKIUS, LLP
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1111 PENNSYLVANIA AVENUE, N.W.,
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WASHINGTON, D.C. 20004
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