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Reel/Frame:020622/0595   Pages: 2
Recorded: 02/28/2008
Attorney Dkt #:029929-00003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11663985
Filing Dt:
02/28/2008
Publication #:
Pub Dt:
07/30/2009
Title:
Method for etching interlayer dielectric film
Assignor
1
Exec Dt:
04/13/2007
Assignee
1
4-3-4 KOJIMACHI, CHIYODA-KU
TOKYO, JAPAN 102-0083
Correspondence name and address
ARENT FOX LLP
1050 CONNECTICUT AVENUE, N.W.
SUITE 400
WASHINGTON, DC 20036

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