Patent Assignment Details
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| Reel/Frame: | 020910/0202 | |
| Pages: | 3 |
| | Recorded: | 04/29/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/20/2009
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Application #:
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12068452
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Filing Dt:
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02/06/2008
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Publication #:
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Pub Dt:
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08/21/2008
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Title:
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HEAT PROCESSING METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESS
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU, |
| TOKYO, JAPAN 107-8471 |
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Correspondence name and address
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MICHAEL A. MAKUCH
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SMITH, GAMBRELL & RUSSELL, LLP
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1130 CONNECTICUT AVENUE - SUITE 1130
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WASHINGTON, DC 20036
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