Patent Assignment Details
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| Reel/Frame: | 020910/0219 | |
| Pages: | 2 |
| | Recorded: | 04/24/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/04/2012
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Application #:
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12148969
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Filing Dt:
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04/24/2008
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Publication #:
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Pub Dt:
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02/04/2010
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Title:
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METHOD FOR CLEANING OPTICAL ELEMENT OF EUV LIGHT SOURCE DEVICE AND OPTICAL ELEMENT CLEANING DEVICE
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Assignee
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| 3-6, AKASAKA 2-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8414 |
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Correspondence name and address
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GERALD T. SHEKLETON
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22ND FLOOR
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120 S. RIVERSIDE PLAZA
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CHICAGO, IL 60606-3912
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