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Patent #:
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Issue Dt:
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01/14/1997
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Application #:
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08321085
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Filing Dt:
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10/11/1994
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Title:
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WAFER POLISHING MACHINE WITH FLUID BEARINGS AND DRIVE SYSTEMS
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Patent #:
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Issue Dt:
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11/05/1996
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Application #:
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08321086
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Filing Dt:
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10/11/1994
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Title:
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WAFER HOLDER FOR SEMICONDUCTOR WAFER POLISHING MACHINE
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Patent #:
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Issue Dt:
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11/19/1996
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Application #:
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08321169
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Filing Dt:
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10/11/1994
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Title:
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POLISHING PAD CLUSTER FOR POLISHING A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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09/24/1996
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Application #:
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08333463
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Filing Dt:
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11/02/1994
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Title:
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WAFER POLISHING MACHINE WITH FLUID BEARINGS
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Patent #:
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Issue Dt:
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09/01/1998
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Application #:
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08638464
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Filing Dt:
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04/26/1996
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Title:
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CONTROL OF CHEMICAL-MECHANICAL POLISHING RATE ACROSS A SUBSTRATE SURFACE
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Patent #:
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Issue Dt:
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03/03/1998
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Application #:
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08729614
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Filing Dt:
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10/11/1996
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Title:
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TECHNIQUE FOR IMPROVING WITHIN-WAFER NON-UNIFORMITY OF MATERIAL REMOVAL FOR PERFORMING CMP
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Patent #:
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Issue Dt:
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02/16/1999
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Application #:
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08795880
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Filing Dt:
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02/06/1997
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Title:
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METHOD AND APPARATUS FOR ALIGNING AND TENSIONING A PAD/BELT USED IN LINEAR PLANARIZATION FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08797470
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Filing Dt:
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02/06/1997
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Title:
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SENSORS FOR A LINEAR POLISHER
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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08800373
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Filing Dt:
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02/14/1997
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Title:
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INTEGRATED PAD AND BELT FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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01/12/1999
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Application #:
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08826552
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Filing Dt:
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04/04/1997
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Title:
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WAFER POLISHING HEAD WITH PAD DRESSING ELEMENT
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Patent #:
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Issue Dt:
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06/12/2001
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Application #:
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08838381
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Filing Dt:
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04/08/1997
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Title:
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POLISHING HEAD WITH REMOVABLE SUBCARRIER
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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08853323
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Filing Dt:
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05/08/1997
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Title:
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LINEAR POLISHER AND METHOD FOR SEMICONDUCTOR WAFER PLANARIZATION
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Patent #:
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Issue Dt:
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08/22/2000
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Application #:
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08865028
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Filing Dt:
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05/28/1997
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Title:
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METHOD AND APPARATUS FOR IN-SITU MONITORING OF THICKNESS DURING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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11/14/2000
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Application #:
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08869655
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Filing Dt:
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05/28/1997
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Title:
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METHOD AND APPARATUS FOR IN-SITU END-POINT DETECTION AND OPTIMIZATION OF A CHEMICAL-MECHANICAL POLISHING PROCESS USING A LINEAR POLISHER
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Patent #:
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Issue Dt:
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09/08/1998
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Application #:
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08879862
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Filing Dt:
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06/20/1997
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Title:
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WAFER POLISHING HEAD
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Patent #:
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Issue Dt:
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06/29/1999
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Application #:
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08882658
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Filing Dt:
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06/25/1997
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Title:
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CONTROL OF CHEMICAL-MECHANICAL POLISHING RATE ACROSS A SUBSTRATE SURFACE FOR A LINEAR POLISHER
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Patent #:
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Issue Dt:
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01/08/2002
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Application #:
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08968333
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Filing Dt:
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11/12/1997
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Title:
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METHOD AND APPARATUS FOR POLISHING SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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09038171
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Filing Dt:
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03/10/1998
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Title:
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WAFER POLISHING DEVICE WITH MOVABLE WINDOW
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Patent #:
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Issue Dt:
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10/17/2000
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Application #:
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09052148
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Filing Dt:
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03/31/1998
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Title:
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APPARATUS AND METHOD FOR FILM THICKNESS MEASUREMENT INTEGRATED INTO A WAFER LOAD/UNLOAD UNIT
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Patent #:
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Issue Dt:
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06/22/1999
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Application #:
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09153817
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Filing Dt:
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09/15/1998
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Title:
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METHOD FOR DRESSING A POLISHING PAD DURING POLISHING OF A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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02/13/2001
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Application #:
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09182532
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Filing Dt:
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10/29/1998
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Title:
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APPARATUS AND METHOD FOR PERFORMING END POINT DETECTION ON A LINEAR PLANARIZATION TOOL
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Patent #:
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Issue Dt:
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12/04/2001
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Application #:
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09182570
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Filing Dt:
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10/29/1998
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Title:
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USE OF ZETA POTENTIAL DURING CHEMICAL MECHANICAL POLISHING FOR END POINT DETECTION
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Patent #:
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Issue Dt:
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07/11/2000
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Application #:
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09188779
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Filing Dt:
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11/09/1998
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Title:
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METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD USED IN CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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05/01/2001
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Application #:
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09280439
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Filing Dt:
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03/29/1999
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Title:
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METHOD AND APPARATUS FOR STABILIZING THE PROCESS TEMPERATURE DURING CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09316166
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Filing Dt:
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05/21/1999
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Title:
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CHEMICAL MECHANICAL PLANARIZATION OR POLISHING PAD WITH SECTIONS HAVING VARIED GROOVE PATTERNS
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Patent #:
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Issue Dt:
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03/05/2002
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Application #:
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09322198
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Filing Dt:
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05/28/1999
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Title:
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METHOD AND SYSTEM FOR CLEANING A CHEMICAL MECHANICAL POLISHING PAD
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Patent #:
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Issue Dt:
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07/04/2000
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Application #:
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09385769
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Filing Dt:
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08/30/1999
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Title:
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SPINDLE ASSEMBLY FOR FORCE CONTROLLED POLISHING
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09467460
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Filing Dt:
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12/20/1999
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Title:
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SYSTEM AND METHOD OF DEFECT OPTIMIZATION FOR CHEMICAL MECHANICAL PLANARIZATION OF POLYSILICON
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09475518
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Filing Dt:
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12/30/1999
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Title:
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METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
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Patent #:
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Issue Dt:
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07/30/2002
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Application #:
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09475543
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Filing Dt:
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12/30/1999
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Title:
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POLISHING HEAD FOR CHEMICAL MECHANICAL POLISHING USING LINEAR PLANARIZATION TECHNOLOGY
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Patent #:
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Issue Dt:
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05/27/2003
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Application #:
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09476459
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Filing Dt:
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12/30/1999
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Title:
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POLISHING PAD AND METHOD OF MANUFACTURE
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Patent #:
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Issue Dt:
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01/22/2002
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Application #:
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09493978
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Filing Dt:
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01/28/2000
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Title:
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System and method for controlled polishing and planarization of semiconductor wafers
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Patent #:
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Issue Dt:
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06/11/2002
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Application #:
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09539397
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Filing Dt:
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03/31/2000
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Title:
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Planarization system for chemical-mechanical polishing
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09540385
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Filing Dt:
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03/31/2000
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Title:
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Method and apparatus for chemically-mechanically polishing semiconductor wafers
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Patent #:
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Issue Dt:
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09/30/2003
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Application #:
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09540602
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Filing Dt:
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03/31/2000
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Title:
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METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD
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Patent #:
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Issue Dt:
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12/23/2003
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Application #:
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09540603
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Filing Dt:
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03/31/2000
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Title:
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WAFER CARRIER HEAD ASSEMBLY
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Patent #:
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Issue Dt:
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09/09/2003
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Application #:
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09541109
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Filing Dt:
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03/31/2000
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Title:
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METHOD AND APPARATUS FOR FIXED-ABRASIVE SUBSTRATE MANUFACTURING AND WAFER POLISHING IN A SINGLE PROCESS PATH
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09541144
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Filing Dt:
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03/31/2000
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Title:
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METHOD AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION AND POLISHING OF SEMICONDUCTOR WAFERS USING A CONTINUOUS POLISHING MEMBER FEED
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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09558877
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Filing Dt:
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04/26/2000
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Publication #:
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Pub Dt:
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07/11/2002
| | | | |
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Title:
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METHOD AND APPARATUS FOR IN-SITU MONITORING OF THICKNESS DURING CHEMICAL -MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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01/14/2003
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Application #:
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09603573
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Filing Dt:
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06/26/2000
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Title:
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APPARATUS FOR WAFER CARRIER IN-PROCESS CLEAN AND RINSE
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Patent #:
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Issue Dt:
|
01/07/2003
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Application #:
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09605562
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Filing Dt:
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06/27/2000
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Title:
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METHOD AND SYSTEM FOR DETECTING AN EXPOSURE OF A MATERIAL ON A SEMICONDUCTOR WAFER DURING CHEMICAL-MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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12/31/2002
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Application #:
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09607727
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Filing Dt:
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06/30/2000
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Title:
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LINEAR RECIPROCATING DISPOSABLE BELT POLISHING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09607743
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Filing Dt:
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06/30/2000
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Title:
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CONDITIONING MECHANISM IN A CHEMICAL MECHANICAL POLISHING APPARATUS FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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03/26/2002
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Application #:
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09607895
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Filing Dt:
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06/30/2000
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Title:
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Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process
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Patent #:
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Issue Dt:
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09/10/2002
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Application #:
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09607896
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Filing Dt:
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06/30/2000
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Title:
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POLISHING APPARATUS AND SUBSTRATE RETAINER RING PROVIDING CONTINUOUS SLURRY DISTRIBUTION
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Patent #:
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Issue Dt:
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04/23/2002
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Application #:
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09608242
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Filing Dt:
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06/30/2000
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Title:
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END-POINT DETECTION SYSTEM FOR CHEMICAL MECHANICAL POLISHING APPLICATIONS
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09608286
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Filing Dt:
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06/30/2000
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Title:
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METHOD AND APPARATUS FOR ALIGNING AND SETTING THE AXIS OF ROTATION OF SPINDLES OF A MULTI-BODY SYSTEM
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Patent #:
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Issue Dt:
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03/19/2002
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Application #:
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09608462
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Filing Dt:
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06/30/2000
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Title:
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Field controlled polishing apparatus and method
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Patent #:
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Issue Dt:
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10/22/2002
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Application #:
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09608508
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Filing Dt:
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06/30/2000
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Title:
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METHOD AND APPARATUS FOR SLURRY DISTRIBUTION
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09608510
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Filing Dt:
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06/30/2000
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Title:
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Wafer carrier with groove for decoupling retainer ring from wafer
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Patent #:
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Issue Dt:
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02/18/2003
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Application #:
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09608513
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Filing Dt:
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06/30/2000
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Title:
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OSCILLATING FIXED ABRASIVE CMP SYSTEM AND METHODS FOR IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09608522
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Filing Dt:
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06/30/2000
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Title:
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APPARATUS AND METHOD FOR QUALIFYING A CHEMICAL MECHANICAL PLANARIZATION PROCESS
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09609590
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Filing Dt:
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06/30/2000
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Title:
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METHOD AND APPARATUS FOR FIXED ABRASIVE SUBSTRATE PREPARATION AND USE IN A CLUSTER CMP TOOL
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Patent #:
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Issue Dt:
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12/11/2001
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Application #:
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09612992
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Filing Dt:
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07/10/2000
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Title:
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Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
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Patent #:
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Issue Dt:
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04/22/2003
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Application #:
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09636340
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Filing Dt:
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08/10/2000
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Title:
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METHOD AND SYSTEM FOR MEASURING THRESHOLD LENGTH
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Patent #:
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Issue Dt:
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07/01/2003
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Application #:
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09644135
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Filing Dt:
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08/22/2000
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Title:
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SUBAPERTURE CHEMICAL MECHANICAL POLISHING SYSTEM
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09664609
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Filing Dt:
|
09/18/2000
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Title:
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SACRIFICIAL RETAINING RING CMP SYSTEM AND METHODS FOR IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
|
11/25/2003
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Application #:
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09668667
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Filing Dt:
|
09/22/2000
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Title:
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APPARATUS AND METHODS FOR CONTROLLING RETAINING RING AND WAFER HEAD TILT FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
|
09/03/2002
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Application #:
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09668705
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Filing Dt:
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09/22/2000
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Title:
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APPARATUS AND METHODS FOR CONTROLLING PAD CONDITIONING HEAD TILT FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
|
09/24/2002
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Application #:
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09670469
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Filing Dt:
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09/26/2000
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Title:
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EDGE INSTABILITY SUPPRESSING DEVICE AND SYSTEM
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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09672605
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Filing Dt:
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09/29/2000
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Title:
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POLISHING HEAD ASSEMBLY
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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09678423
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Filing Dt:
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10/02/2000
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Title:
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WEB-STYLE PAD CONDITIONING SYSTEM AND METHODS FOR IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09680589
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Filing Dt:
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10/06/2000
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Title:
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Method of optimizing chemical mechanical planarization process
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09684028
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Filing Dt:
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10/05/2000
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Title:
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INTERLOCKING CHEMICAL MECHANICAL POLISHING SYSTEM
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Patent #:
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Issue Dt:
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01/07/2003
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Application #:
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09684765
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Filing Dt:
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10/06/2000
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Title:
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ACTIVATED SLURRY CMP SYSTEM AND METHODS FOR IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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09747765
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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CHEMICAL MECHANICAL POLISHING APPARATUS AND METHODS WITH CENTRAL CONTROL OF POLISHING PRESSURE APPLIED BY POLISHING HEAD
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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09747828
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Filing Dt:
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12/21/2000
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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PLATEN DESIGN FOR IMPROVING EDGE PERFORMANCE IN CMP APPLICATIONS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09747844
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Filing Dt:
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12/21/2000
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Publication #:
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Pub Dt:
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06/27/2002
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Title:
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Piezoelectric platen design for improving performance in CMP applications
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Patent #:
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Issue Dt:
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08/19/2003
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Application #:
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09747845
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Filing Dt:
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12/21/2000
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Title:
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PRESSURIZED MEMBRANE PLATEN DESIGN FOR IMPROVING PERFORMANCE IN CMP APPLICATIONS
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Patent #:
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Issue Dt:
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01/27/2009
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Application #:
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09748708
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Filing Dt:
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12/22/2000
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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POLISHING APPARATUS AND METHODS HAVING HIGH PROCESSING WORKLOAD FOR CONTROLLING POLISHING PRESSURE APPLIED BY POLISHING HEAD
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09752509
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Filing Dt:
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12/27/2000
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Title:
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METHODS FOR MAKING REINFORCED WAFER POLISHING PADS AND APPARATUSES IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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09752610
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Filing Dt:
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12/27/2000
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Title:
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METHOD FOR MANUFACTURING A RECLAIMABLE TEST PATTERN WAFER FOR CMP APPLICATIONS
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Patent #:
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Issue Dt:
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06/03/2003
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Application #:
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09752703
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Filing Dt:
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12/27/2000
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Title:
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METHODS FOR MAKING REINFORCED WAFER POLISHING PADS UTILIZING DIRECT CASTING AND APPARATUSES IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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03/16/2004
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Application #:
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09754480
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Filing Dt:
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01/04/2001
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Publication #:
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Pub Dt:
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08/09/2001
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Title:
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SYSTEM AND METHOD FOR POLISHING AND PLANARIZING SEMICONDUCTOR WAFERS USING REDUCED SURFACE AREA POLISHING PADS AND VARIABLE PARTIAL PAD-WAFER OVERLAPPING TECHNIQUES
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Patent #:
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Issue Dt:
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04/29/2003
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Application #:
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09754702
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Filing Dt:
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01/04/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD WITH SONIC ENERGY
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Patent #:
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Issue Dt:
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08/26/2003
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Application #:
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09757452
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Filing Dt:
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01/09/2001
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Publication #:
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Pub Dt:
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07/11/2002
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Title:
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CHEMICAL MECHANICAL PLANARIZATION BELT ASSEMBLY AND METHOD OF ASSEMBLY
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Patent #:
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Issue Dt:
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04/05/2005
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Application #:
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09796955
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Filing Dt:
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02/28/2001
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Publication #:
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Pub Dt:
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07/04/2002
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Title:
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METHOD AND APPARATUS FOR CONDITIONING A POLISHING PAD WITH SONIC ENERGY
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Patent #:
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Issue Dt:
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12/16/2003
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Application #:
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09812535
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Filing Dt:
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03/19/2001
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Title:
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IN-SITU DETECTION OF THIN-METAL INTERFACE USING OPTICAL INTERFERENCE
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Patent #:
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Issue Dt:
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04/20/2004
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Application #:
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09823151
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Filing Dt:
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03/29/2001
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Publication #:
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Pub Dt:
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12/19/2002
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Title:
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APPARATUS AND METHODS WITH RESOLUTION ENHANCEMENT FEATURE FOR IMPROVING ACCURACY OF CONVERSION OF REQUIRED CHEMICAL MECHANICAL POLISHING PRESSURE TO FORCE TO BE APPLIED BY POLISHING HEAD TO WAFER
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Patent #:
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Issue Dt:
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03/23/2004
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Application #:
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09823169
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Filing Dt:
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03/29/2001
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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APPARATUS AND METHODS FOR ALIGNING A SURFACE OF AN ACTIVE RETAINER RING WITH A WAFER SURFACE FOR CHEMICAL MECHANICAL POLISHING
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Patent #:
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Issue Dt:
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09/02/2003
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Application #:
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09823198
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Filing Dt:
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03/29/2001
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Title:
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METHOD AND APPARATUS FOR END POINT TRIGGERING WITH INTEGRATED STEERING
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Patent #:
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Issue Dt:
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05/13/2003
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Application #:
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09823593
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Filing Dt:
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03/30/2001
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Publication #:
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Pub Dt:
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10/03/2002
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Title:
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ADJUSTABLE FORCE APPLYING AIR PLATEN AND SPINDLE SYSTEM, AND METHODS FOR USING THE SAME
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09823685
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Filing Dt:
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03/30/2001
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Title:
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APPARATUS FOR ACCURATE ENDPOINT DETECTION IN SUPPORTED POLISHING PADS
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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09823722
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Filing Dt:
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03/30/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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APPARATUS FOR CONTROLLING LEADING EDGE AND TRAILING EDGE POLISHING
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09823788
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Filing Dt:
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03/30/2001
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Title:
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POLISHING PAD IRONING SYSTEM AND METHOD FOR IMPLEMENTING THE SAME
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Patent #:
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Issue Dt:
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04/13/2004
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Application #:
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09823800
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Filing Dt:
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03/30/2001
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Title:
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ACTIVE RETAINING RING SUPPORT
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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09825643
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Filing Dt:
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04/04/2001
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Publication #:
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Pub Dt:
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10/10/2002
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Title:
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METHOD FOR OPTIMIZING THE PLANARIZING LENGTH OF A POLISHING PAD
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Patent #:
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Issue Dt:
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06/28/2005
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Application #:
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09843323
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Filing Dt:
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04/25/2001
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Title:
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SPHERICAL CAP-SHAPED POLISHING HEAD IN A CHEMICAL MECHANICAL POLISHING APPARATUS FOR SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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09876451
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Filing Dt:
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06/07/2001
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Publication #:
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Pub Dt:
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12/12/2002
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Title:
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APPARATUS AND METHOD FOR CONDITIONING POLISHING PAD IN A CHEMICAL MECHANICAL PLANARIZATION PROCESS
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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09877459
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Filing Dt:
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06/07/2001
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Publication #:
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Pub Dt:
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01/03/2002
| | | | |
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Title:
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PROJECTED GIMBAL POINT DRIVE
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Patent #:
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Issue Dt:
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03/30/2004
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Application #:
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09925254
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Filing Dt:
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08/08/2001
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Publication #:
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Pub Dt:
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02/13/2003
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Title:
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PLATEN ASSEMBLY HAVING A TOPOGRAPHICALLY ALTERED PLATEN SURFACE
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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09976442
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Filing Dt:
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10/12/2001
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Publication #:
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Pub Dt:
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01/29/2004
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Title:
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IN-SITU DETECTION OF THIN-METAL INTERFACE USING OPTICAL INTERFERENCE VIA A DYNAMICALLY UPDATED REFERENCE
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Patent #:
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Issue Dt:
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06/08/2004
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Application #:
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09976579
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Filing Dt:
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10/12/2001
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Title:
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IN-SITU DETECTION OF THIN-METAL INTERFACE USING HIGH RESOLUTION SPECTRAL ANALYSIS OF OPTICAL INTERFERENCE
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Patent #:
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Issue Dt:
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06/08/2004
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Application #:
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09999066
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Filing Dt:
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10/24/2001
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Title:
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POLISHING HEAD ASSEMBLY IN AN APPARATUS FOR CHEMICAL MECHANCIAL PLANARIZATION
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Patent #:
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Issue Dt:
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12/30/2003
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Application #:
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10002575
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Filing Dt:
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11/14/2001
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Title:
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SYSTEM FOR IN-SITU MONITORING OF REMOVAL RATE/THICKNESS OF TOP LAYER DURING PLANARIZATION
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Patent #:
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Issue Dt:
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04/06/2004
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Application #:
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10013429
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Filing Dt:
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12/07/2001
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Publication #:
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Pub Dt:
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06/12/2003
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Title:
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LOW FRICTION GIMBALED SUBSTRATE HOLDER FOR CMP APPARATUS
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Patent #:
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Issue Dt:
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07/29/2003
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Application #:
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10016883
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Filing Dt:
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12/12/2001
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Title:
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APPARATUS AND METHOD FOR PROVIDING A SIGNAL PORT IN A POLISHING PAD FOR OPTICAL ENDPOINT DETECTION
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Patent #:
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Issue Dt:
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10/26/2004
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Application #:
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10027947
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Filing Dt:
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12/20/2001
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Title:
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APPARATUS FOR REMOVAL/REMAINING THICKNESS PROFILE MANIPULATION
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Patent #:
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Issue Dt:
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07/27/2004
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Application #:
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10029192
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Filing Dt:
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12/20/2001
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Title:
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METHOD AND APPARATUS FOR CHEMICAL MECHANICAL PLANARIZATION
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Patent #:
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Issue Dt:
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09/06/2005
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Application #:
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10029457
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Filing Dt:
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12/21/2001
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Title:
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POROUS MATERIAL AIR BEARING PLATEN FOR CHEMICAL MECHANICAL PLANARIZATION
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