Patent Assignment Details
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| Reel/Frame: | 021119/0945 | |
| Pages: | 4 |
| | Recorded: | 06/19/2008 | | |
| Attorney Dkt #: | 324634US26X |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/14/2012
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Application #:
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12058323
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Filing Dt:
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03/28/2008
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Publication #:
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Pub Dt:
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10/02/2008
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Title:
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PLASMA PROCESSING SYSTEM, PLASMA MEASUREMENT SYSTEM, PLASMA MEASUREMENT METHOD, AND PLASMA CONTROL SYSTEM
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Assignees
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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| 1-1, KATAHIRA 2-CHOME, AOBA-KU |
| SENDAI-SHI, MIYAGI, JAPAN 980-8577 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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