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Reel/Frame:021237/0196   Pages: 3
Recorded: 07/15/2008
Attorney Dkt #:029929-00008
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
11664091
Filing Dt:
07/14/2008
Publication #:
Pub Dt:
04/23/2009
Title:
Semiconductor device and method for manufacturing the same, dry-etching process, method for making electrical connections, and etching apparatus
Assignors
1
Exec Dt:
04/13/2007
2
Exec Dt:
04/10/2007
3
Exec Dt:
04/16/2007
4
Exec Dt:
04/04/2007
5
Exec Dt:
04/04/2007
Assignee
1
4-3-4 KOJIMACHI, CHIYODA-KU,
TOKYO, JAPAN 102-0083
Correspondence name and address
ARENT FOX LLP
1050 CONNECTICUT AVENUE, N.W.
SUITE 400
WASHINGTON, DC 20036-5339

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