Patent Assignment Details
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| Reel/Frame: | 021279/0468 | |
| Pages: | 4 |
| | Recorded: | 07/23/2008 | | |
| Attorney Dkt #: | 272998US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/25/2008
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Application #:
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10536322
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Filing Dt:
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05/26/2005
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Publication #:
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Pub Dt:
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06/15/2006
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Title:
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METHOD FOR CLEANING SUBSTRATE PROCESSING CHAMBER
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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Correspondence name and address
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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