Patent Assignment Details
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| Reel/Frame: | 021284/0834 | |
| Pages: | 3 |
| | Recorded: | 07/15/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10583847
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Filing Dt:
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07/15/2008
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Publication #:
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Pub Dt:
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11/06/2008
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Title:
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Temperature Controlling Method for Substrate Processing System and Substrate Processing System
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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Correspondence name and address
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MICHAEL A. MAKUCH
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SMITH, GAMBRELL & RUSSELL, LLLP
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1130 CONNECTICUT AVENUE
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SUITE 1130
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WASHINGTON, DC 20036
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