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Reel/Frame:021297/0507   Pages: 6
Recorded: 07/28/2008
Attorney Dkt #:2007-068
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/19/2011
Application #:
12177750
Filing Dt:
07/22/2008
Publication #:
Pub Dt:
01/28/2010
Title:
ION IMPLANTATION WITH HEAVY HALOGENIDE COMPOUNDS
Assignors
1
Exec Dt:
07/22/2008
2
Exec Dt:
07/22/2008
3
Exec Dt:
07/22/2008
Assignee
1
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondence name and address
SCOTT R. FABER
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
35 DORY ROAD
GLOUCESTER, MA 01930

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