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Patent Assignment Details
NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:021360/0092   Pages: 5
Recorded: 08/08/2008
Conveyance: MERGER (SEE DOCUMENT FOR DETAILS).
Total properties: 36
1
Patent #:
5700046
Issue Dt:
12/23/1997
Application #:
08527796
Filing Dt:
09/13/1995
Title:
WAFER GRIPPER
2
Patent #:
5733024
Issue Dt:
03/31/1998
Application #:
08527797
Filing Dt:
09/13/1995
Title:
MODULAR SYSTEM
3
Patent #:
5733096
Issue Dt:
03/31/1998
Application #:
08527798
Filing Dt:
09/13/1995
Title:
MULTI-STAGE TELESCOPING STRUCTURE
4
Patent #:
5756157
Issue Dt:
05/26/1998
Application #:
08725282
Filing Dt:
10/02/1996
Title:
METHOD FOR PROCESSING FLAT PANEL DISPLAYS AND LARGE WAFERS
5
Patent #:
6091056
Issue Dt:
07/18/2000
Application #:
08938396
Filing Dt:
09/26/1997
Title:
HOT PLATE OVEN FOR PROCESSING FLAT PANEL DISPLAYS AND LARGE WAFERS
6
Patent #:
6027760
Issue Dt:
02/22/2000
Application #:
08987179
Filing Dt:
12/08/1997
Title:
PHOTORESIST COATING PROCESS CONTROL WITH SOLVENT VAPOR SENSOR
7
Patent #:
6177133
Issue Dt:
01/23/2001
Application #:
08988288
Filing Dt:
12/10/1997
Title:
METHOD AND APPARATUS FOR ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
8
Patent #:
6191053
Issue Dt:
02/20/2001
Application #:
09094443
Filing Dt:
06/10/1998
Title:
HIGH EFFICIENCY PHOTORESIST COATING
9
Patent #:
6248171
Issue Dt:
06/19/2001
Application #:
09221060
Filing Dt:
12/28/1998
Title:
YIELD AND LINE WIDTH PERFORMANCE FOR LIQUID POLYMERS AND OTHER MATERIALS
10
Patent #:
6254936
Issue Dt:
07/03/2001
Application #:
09222117
Filing Dt:
12/29/1998
Title:
ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
11
Patent #:
6533531
Issue Dt:
03/18/2003
Application #:
09222622
Filing Dt:
12/29/1998
Title:
DEVICE FOR HANDLING WAFERS IN MICROELECTRONIC MANUFACTURING
12
Patent #:
6616394
Issue Dt:
09/09/2003
Application #:
09223111
Filing Dt:
12/30/1998
Title:
APPARATUS FOR PROCESSING WAFERS
13
Patent #:
6246203
Issue Dt:
06/12/2001
Application #:
09245445
Filing Dt:
02/05/1999
Title:
DIRECT SKEW CONTROL AND INTERLOCK OF GANTRY
14
Patent #:
6966364
Issue Dt:
11/22/2005
Application #:
09248768
Filing Dt:
02/12/1999
Title:
SYSTEMS AND METHODS FOR CONTROLLING LOCAL ENVIRONMENT
15
Patent #:
6242364
Issue Dt:
06/05/2001
Application #:
09275360
Filing Dt:
03/23/1999
Title:
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
16
Patent #:
6418356
Issue Dt:
07/09/2002
Application #:
09336353
Filing Dt:
06/18/1999
Publication #:
US20020059015
Pub Dt:
05/16/2002
Title:
METHOD AND APPARATUS FOR RESOLVING CONFLICTS IN A SUBSTRATE PROCESSING SYSTEM
17
Patent #:
6322337
Issue Dt:
11/27/2001
Application #:
09360851
Filing Dt:
07/24/1999
Title:
LIQUID DISPENSING SYSTEMS AND METHODS
18
Patent #:
6238735
Issue Dt:
05/29/2001
Application #:
09391964
Filing Dt:
09/08/1999
Title:
METHOD OF UNIFORMLY COATING A SUBSTRATE
19
Patent #:
6472643
Issue Dt:
10/29/2002
Application #:
09519963
Filing Dt:
03/07/2000
Title:
SUBSTRATE THERMAL MANAGEMENT SYSTEM
20
Patent #:
6414276
Issue Dt:
07/02/2002
Application #:
09520077
Filing Dt:
03/07/2000
Title:
METHOD FOR SUBSTRATE THERMAL MANAGEMENT
21
Patent #:
6678572
Issue Dt:
01/13/2004
Application #:
09521026
Filing Dt:
03/07/2000
Title:
RECIPE CASCADING IN A WAFER PROCESSING SYSTEM
22
Patent #:
6302662
Issue Dt:
10/16/2001
Application #:
09522249
Filing Dt:
03/09/2000
Title:
Liquid dispensing systems and methods
23
Patent #:
6327793
Issue Dt:
12/11/2001
Application #:
09531912
Filing Dt:
03/20/2000
Title:
Method for two dimensional adaptive process control of critical dimensions during spin coating process
24
Patent #:
6844027
Issue Dt:
01/18/2005
Application #:
09563775
Filing Dt:
05/02/2000
Title:
ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
25
Patent #:
6468586
Issue Dt:
10/22/2002
Application #:
09566605
Filing Dt:
05/08/2000
Title:
ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
26
Patent #:
6865437
Issue Dt:
03/08/2005
Application #:
09602527
Filing Dt:
06/23/2000
Title:
ROBOT PRE-POSITIONING IN A WAFER PROCESSING SYSTEM
27
Patent #:
6746826
Issue Dt:
06/08/2004
Application #:
09624712
Filing Dt:
07/25/2000
Title:
METHOD FOR AN IMPROVED DEVELOPING PROCESS IN WAFER PHOTOLITHOGRAPHY
28
Patent #:
6509577
Issue Dt:
01/21/2003
Application #:
09709975
Filing Dt:
11/10/2000
Title:
SYSTEMS AND METHODS FOR EXPOSING SUBSTRATE PERIPHERY
29
Patent #:
6669779
Issue Dt:
12/30/2003
Application #:
09800060
Filing Dt:
03/05/2001
Publication #:
US20020187442
Pub Dt:
12/12/2002
Title:
YIELD AND LINE WIDTH PERFORMANCE FOR LIQUID POLYMERS AND OTHER MATERIALS
30
Patent #:
6955720
Issue Dt:
10/18/2005
Application #:
09874073
Filing Dt:
06/04/2001
Publication #:
US20010044217
Pub Dt:
11/22/2001
Title:
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
31
Patent #:
7030039
Issue Dt:
04/18/2006
Application #:
09895787
Filing Dt:
06/30/2001
Publication #:
US20020098283
Pub Dt:
07/25/2002
Title:
METHOD OF UNIFORMLY COATING A SUBSTRATE
32
Patent #:
6662466
Issue Dt:
12/16/2003
Application #:
10013785
Filing Dt:
12/11/2001
Publication #:
US20020112370
Pub Dt:
08/22/2002
Title:
METHOD FOR TWO DIMENSIONAL ADAPTIVE PROCESS CONTROL OF CRITICAL DIMENSIONS DURING SPIN COATING PROCESS
33
Patent #:
6911091
Issue Dt:
06/28/2005
Application #:
10161840
Filing Dt:
06/03/2002
Publication #:
US20030010289
Pub Dt:
01/16/2003
Title:
ENVIRONMENT EXCHANGE CONTROL FOR MATERIAL ON A WAFER SURFACE
34
Patent #:
6694218
Issue Dt:
02/17/2004
Application #:
10172400
Filing Dt:
06/14/2002
Publication #:
US20030028282
Pub Dt:
02/06/2003
Title:
METHOD AND APPARATUS FOR RESOLVING CONFLICTS IN A SUBSTRATE PROCESSING SYSTEM
35
Patent #:
6717113
Issue Dt:
04/06/2004
Application #:
10188546
Filing Dt:
07/02/2002
Publication #:
US20020195438
Pub Dt:
12/26/2002
Title:
METHOD FOR SUBSTRATE THERMAL MANAGEMENT
36
Patent #:
7004708
Issue Dt:
02/28/2006
Application #:
10618175
Filing Dt:
07/11/2003
Publication #:
US20040107014
Pub Dt:
06/03/2004
Title:
APPARATUS FOR PROCESSING WAFERS
Assignor
1
ASML US, LLC
Exec Dt:
12/31/2002
Assignee
1
ASML US, INC.
8555 SOUTH RIVER PARKWAY
TEMPE, ARIZONA 85284
Correspondence name and address
STERNE KESSLER GOLDSTEIN & FOX PLLC
1100 NEW YORK AVENUE, NW
WASHINGTON, DC 20005

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