Patent Assignment Details
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| Reel/Frame: | 021362/0441 | |
| Pages: | 3 |
| | Recorded: | 08/08/2008 | | |
| Attorney Dkt #: | 330253US2X |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/24/2010
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Application #:
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12187770
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Filing Dt:
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08/07/2008
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Publication #:
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Pub Dt:
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04/02/2009
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Title:
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BEAM IRRADIATION APPARATUS WITH DEEP ULTRAVIOLET LIGHT EMISSION DEVICE FOR LITHOGRAPHIC PATTERN INSPECTION SYSTEM
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Assignee
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| 8, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI |
| KANAGAWA, JAPAN 235-0032 |
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Correspondence name and address
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RONALD TURNER
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OBLON, SPIVAK, ET AL.
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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