Patent Assignment Details
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Reel/Frame: | 021510/0133 | |
| Pages: | 3 |
| | Recorded: | 09/10/2008 | | |
Attorney Dkt #: | 12909USA/ETCH/DRIE |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12038921
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Filing Dt:
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02/28/2008
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Publication #:
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Pub Dt:
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09/03/2009
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Title:
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METHOD AND SYSTEM FOR CONTROLLING CENTER-TO-EDGE DISTRIBUTION OF SPECIES WITHIN A PLASMA
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PAULINE S. FISCHER
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APPLIED MATERIALS, INC.
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P.O. BOX 450 A
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SANTA CLARA, CA 95052
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