Patent Assignment Details
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| Reel/Frame: | 021560/0955 | |
| Pages: | 4 |
| | Recorded: | 09/18/2008 | | |
| Attorney Dkt #: | 133706 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/07/2012
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Application #:
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12196133
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Filing Dt:
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08/21/2008
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Publication #:
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Pub Dt:
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03/05/2009
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Title:
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MOVABLE BODY DRIVE METHOD AND MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD FOR CONTINUOUS POSITION MEASUREMENT OF MOVABLE BODY BEFORE AND AFTER SWITCHING BETWEEN SENSOR HEADS
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME |
| CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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MARIO A. COSTANTINO
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OLIFF & BERRIDGE, PLC
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P.O. BOX 320850
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ALEXANDRIA, VA 22320-4850
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