Patent Assignment Details
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| Reel/Frame: | 021564/0446 | |
| Pages: | 3 |
| | Recorded: | 09/09/2008 | | |
| Attorney Dkt #: | KOKUSAI126US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/19/2013
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Application #:
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12232007
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Filing Dt:
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09/09/2008
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Publication #:
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Pub Dt:
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04/23/2009
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Title:
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TEMPERATURE CONTROL METHOD, METHOD OF OBTAINING A TEMPERATURE CORRECTION VALUE, METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SUBSTRATE TREATMENT APPARATUS
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Assignee
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| 14-1, SOTOKANDA 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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SEAN M. MCGINN, ESQ.
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MCGINN IP LAW GROUP, PLLC
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8321 OLD COURTHOUSE ROAD
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SUITE 200
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VIENNA, VIRGINIA 22182-3817
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