Patent Assignment Details
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| Reel/Frame: | 021600/0181 | |
| Pages: | 3 |
| | Recorded: | 09/29/2008 | | |
| Attorney Dkt #: | 09108.0024 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12173943
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Filing Dt:
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07/16/2008
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Publication #:
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Pub Dt:
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01/22/2009
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Title:
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METHOD OF INSPECTING EXPOSURE SYSTEM AND EXPOSURE SYSTEM
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Assignee
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| 1-1, SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-8001 |
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Correspondence name and address
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FINNEGAN HENDERSON
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001
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