Patent Assignment Details
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Reel/Frame: | 021608/0370 | |
| Pages: | 5 |
| | Recorded: | 09/30/2008 | | |
Attorney Dkt #: | 067162-0043 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/22/2011
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Application #:
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12241614
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Filing Dt:
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09/30/2008
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Publication #:
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Pub Dt:
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04/09/2009
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Title:
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APPARATUS AND A METHOD FOR INSPECTION OF A MASK BLANK, A METHOD FOR MANUFACTURING A REFLECTIVE EXPOSURE MASK, A METHOD FOR REFLECTIVE EXPOSURE, AND A METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUITS
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Assignee
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6-2, OTEMACHI 2-CHOME, CHIYODA-KU, |
TOKYO, JAPAN 100-0004 |
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Correspondence name and address
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MCDERMOTT WILL & EMERY LLP
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600 13TH STREET, N.W.
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WASHINGTON, DC 20005-3096
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