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Reel/Frame:	021658/0928			Pages:	16
		Recorded:	10/10/2008
Attorney Dkt #:	044296-0003
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 88

1

Patent #:	4571850	Issue Dt:	02/25/1986	Application #:	06611522	Filing Dt:	05/17/1984
Title:	CENTRIFUGAL WAFER PROCESSOR

2

Patent #:	5090432	Issue Dt:	02/25/1992	Application #:	07598426	Filing Dt:	10/16/1990
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSING SYSTEM

3

Patent #:	5148823	Issue Dt:	09/22/1992	Application #:	07598909	Filing Dt:	10/16/1990
Title:	SINGLE CHAMBER MEGASONIC ENERGY CLEANER

4

Patent #:	5247954	Issue Dt:	09/28/1993	Application #:	07791094	Filing Dt:	11/12/1991
Title:	MEGASONIC CLEANING SYSTEM

5

Patent #:	5286657	Issue Dt:	02/15/1994	Application #:	07809799	Filing Dt:	12/18/1991
Title:	SINGLE WAFER MEGASONIC SEMICONDUCTOR WAFER PROCESSENG SYSTEM

6

Patent #:	5226242	Issue Dt:	07/13/1993	Application #:	07837221	Filing Dt:	02/18/1992
Title:	VAPOR JET DRYER APPARATUS AND METHOD

7

Patent #:	5234540	Issue Dt:	08/10/1993	Application #:	07876043	Filing Dt:	04/30/1992
Title:	PROCESS FOR ETCHING OXIDE FILMS IN A SEALED PHOTOCHEMICAL REACTOR

8

Patent #:	5365960	Issue Dt:	11/22/1994	Application #:	08042889	Filing Dt:	04/05/1993
Title:	MEGASONIC TRANSDUCER ASSEMBLY

9

Patent #:	5556479	Issue Dt:	09/17/1996	Application #:	08275807	Filing Dt:	07/15/1994
Title:	METHOD AND APPARATUS FOR DRYING SEMICONDUCTOR WAFERS

10

Patent #:	5625249	Issue Dt:	04/29/1997	Application #:	08277792	Filing Dt:	07/20/1994
Title:	MEGASONIC CLEANING SYSTEM

11

Patent #:	5656097	Issue Dt:	08/12/1997	Application #:	08361139	Filing Dt:	12/21/1994
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

12

Patent #:	6039059	Issue Dt:	03/21/2000	Application #:	08724518	Filing Dt:	09/30/1996
Title:	WAFER CLEANING SYSTEM

13

Patent #:	6240938	Issue Dt:	06/05/2001	Application #:	08761717	Filing Dt:	12/06/1996
Title:	DEVICE FOR TREATING SUBSTRATES IN A FLUID CONTAINER

14

Patent #:	6286688	Issue Dt:	09/11/2001	Application #:	08825883	Filing Dt:	04/02/1997
Title:	COMPLIANT SILICON WAFER HANDLING SYSTEM

15

Patent #:	5807408	Issue Dt:	09/15/1998	Application #:	08851668	Filing Dt:	05/06/1997
Title:	INDUSTRIAL ROBOT SAFETY DEVICE THAT SHUTS DOWN OPERATION IN REPONSE TO VARIATION IN TENSION OF A ROPE

16

Patent #:	5954068	Issue Dt:	09/21/1999	Application #:	08862890	Filing Dt:	05/23/1997
Title:	DEVICE AND METHOD FOR TREATING SUBSTRATES IN A FLUID CONTAINER

17

Patent #:	5902402	Issue Dt:	05/11/1999	Application #:	08875408	Filing Dt:	07/03/1997
Title:	DEVICE FOR CHEMICAL WET TREATMENT

18

Patent #:	5908509	Issue Dt:	06/01/1999	Application #:	08908330	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

19

Patent #:	5996595	Issue Dt:	12/07/1999	Application #:	08908345	Filing Dt:	08/07/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

20

Patent #:	5950645	Issue Dt:	09/14/1999	Application #:	08910033	Filing Dt:	08/11/1997
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

21

Patent #:	6140744	Issue Dt:	10/31/2000	Application #:	09057182	Filing Dt:	04/08/1998
Title:	WAFER CLEANING SYSTEM

22

Patent #:	6523552	Issue Dt:	02/25/2003	Application #:	09068618	Filing Dt:	07/07/1998
Publication #:	US20010008142	Pub Dt:	07/19/2001
Title:	FACILITY FOR TREATING OBJECTS IN A PROCESS TANK

23

Patent #:	5972123	Issue Dt:	10/26/1999	Application #:	09096898	Filing Dt:	06/12/1998
Title:	METHODS FOR TREATING SEMICONDUCTOR WAFERS

24

Patent #:	6269822	Issue Dt:	08/07/2001	Application #:	09171271	Filing Dt:	03/22/1999
Title:	INSTALLATION FOR WET-TREATING SUBSTRATES

25

Patent #:	6145520	Issue Dt:	11/14/2000	Application #:	09171757	Filing Dt:	10/23/1998
Title:	APPARATUS FOR PROCESSING SUBSTRATES IN A FLUID TANK

26

Patent #:	6328809	Issue Dt:	12/11/2001	Application #:	09227637	Filing Dt:	01/08/1999
Title:	VAPOR DRYING SYSTEM AND METHOD

27

Patent #:	6261845	Issue Dt:	07/17/2001	Application #:	09257488	Filing Dt:	02/25/1999
Title:	METHODS AND SYSTEMS FOR DETERMINING CHEMICAL CONCENTRATIONS AND CONTROLLING THE PROCESSING OF SEMICONDCTOR SUBSTRATES

28

Patent #:	6189552	Issue Dt:	02/20/2001	Application #:	09308850	Filing Dt:	05/24/1999
Title:	SUBSTRATE PROCESSING DEVICE

29

Patent #:	6245158	Issue Dt:	06/12/2001	Application #:	09324813	Filing Dt:	06/02/1999
Title:	WET PROCESSING METHODS FOR THE MANUFACTURE OF ELECTRONIC COMPONENTS USINGLIQUIDS OF VARYING TEMPERATURE

30

Patent #:	6647641	Issue Dt:	11/18/2003	Application #:	09367683	Filing Dt:	12/03/1999
Title:	DEVICE AND METHOD FOR THE TREATMENT OF SUBSTRATES IN A FLUID CONTAINER

31

Patent #:	6607604	Issue Dt:	08/19/2003	Application #:	09600084	Filing Dt:	06/30/2000
Title:	METHOD AND APPARATUS FOR TREATING SUBSTRATES

32

Patent #:	6378534	Issue Dt:	04/30/2002	Application #:	09694938	Filing Dt:	10/23/2000
Title:	SEMICONDUCTOR WAFER CLEANING SYSTEM

33

Patent #:	6805754	Issue Dt:	10/19/2004	Application #:	09869213	Filing Dt:	09/28/2001
Title:	DEVICE AND METHOD FOR PROCESSING SUBSTRATES

34

Patent #:	6684890	Issue Dt:	02/03/2004	Application #:	09906384	Filing Dt:	07/16/2001
Publication #:	US20030015216	Pub Dt:	01/23/2003
Title:	MEGASONIC CLEANER PROBE SYSTEM WITH GASIFIED FLUID

35

Patent #:	6679272	Issue Dt:	01/20/2004	Application #:	09922509	Filing Dt:	08/03/2001
Publication #:	US20030024547	Pub Dt:	02/06/2003
Title:	MEGASONIC PROBE ENERGY ATTENUATOR

36

Patent #:	6463938	Issue Dt:	10/15/2002	Application #:	09953504	Filing Dt:	09/13/2001
Publication #:	US20020011256	Pub Dt:	01/31/2002
Title:	WAFER CLEANING METHOD

37

Patent #:	6649018	Issue Dt:	11/18/2003	Application #:	10052823	Filing Dt:	01/17/2002
Publication #:	US20030134518	Pub Dt:	07/17/2003
Title:	SYSTEM FOR REMOVAL OF PHOTORESIST USING SPARGER

38

Patent #:	6767877	Issue Dt:	07/27/2004	Application #:	10053364	Filing Dt:	01/18/2002
Publication #:	US20020144713	Pub Dt:	10/10/2002
Title:	METHOD AND SYSTEM FOR CHEMICAL INJECTION IN SILICON WAFER PROCESSING

39

Patent #:	6871657	Issue Dt:	03/29/2005	Application #:	10053449	Filing Dt:	01/17/2002
Publication #:	US20030121533	Pub Dt:	07/03/2003
Title:	LOW PROFILE WAFER CARRIER

40

Patent #:	7287537	Issue Dt:	10/30/2007	Application #:	10059682	Filing Dt:	01/29/2002
Publication #:	US20030141784	Pub Dt:	07/31/2003
Title:	MEGASONIC PROBE ENERGY DIRECTOR

41

Patent #:	6843859	Issue Dt:	01/18/2005	Application #:	10085565	Filing Dt:	02/26/2002
Title:	DUMP DOOR

42

Patent #:	6837944	Issue Dt:	01/04/2005	Application #:	10091011	Filing Dt:	03/04/2002
Publication #:	US20030019507	Pub Dt:	01/30/2003
Title:	CLEANING AND DRYING METHOD AND APPARATUS

43

Patent #:	6722056	Issue Dt:	04/20/2004	Application #:	10098847	Filing Dt:	03/15/2002
Publication #:	US20020129513	Pub Dt:	09/19/2002
Title:	DRYING VAPOR GENERATION

44

Patent #:	6817369	Issue Dt:	11/16/2004	Application #:	10111332	Filing Dt:	04/18/2002
Title:	DEVICE AND METHOD FOR CLEANING SUBSTRATES

45

Patent #:	6766818	Issue Dt:	07/27/2004	Application #:	10117725	Filing Dt:	04/05/2002
Publication #:	US20020144727	Pub Dt:	10/10/2002
Title:	CHEMICAL CONCENTRATION CONTROL DEVICE

46

Patent #:	6842998	Issue Dt:	01/18/2005	Application #:	10117739	Filing Dt:	04/05/2002
Publication #:	US20030183338	Pub Dt:	10/02/2003
Title:	MEMBRANE DRYER

47

Patent #:	6532974	Issue Dt:	03/18/2003	Application #:	10117768	Filing Dt:	04/05/2002
Publication #:	US20020144708	Pub Dt:	10/10/2002
Title:	PROCESS TANK WITH PRESSURIZED MIST GENERATION

48

Patent #:	6840250	Issue Dt:	01/11/2005	Application #:	10117778	Filing Dt:	04/05/2002
Publication #:	US20020144709	Pub Dt:	10/10/2002
Title:	NEXTGEN WET PROCESS TANK

49

Patent #:	7185661	Issue Dt:	03/06/2007	Application #:	10140029	Filing Dt:	05/06/2002
Publication #:	US20030205238	Pub Dt:	11/06/2003
Title:	RECIPROCATING MEGASONIC PROBE

50

Patent #:	6754980	Issue Dt:	06/29/2004	Application #:	10171426	Filing Dt:	06/12/2002
Publication #:	US20020185152	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER

51

Patent #:	6923192	Issue Dt:	08/02/2005	Application #:	10171429	Filing Dt:	06/12/2002
Publication #:	US20020185153	Pub Dt:	12/12/2002
Title:	STACKABLE PROCESS CHAMBERS

52

Patent #:	6928751	Issue Dt:	08/16/2005	Application #:	10171430	Filing Dt:	06/12/2002
Publication #:	US20020185154	Pub Dt:	12/12/2002
Title:	MEGASONIC CLEANER AND DRYER SYSTEM

53

Patent #:	6681782	Issue Dt:	01/27/2004	Application #:	10243463	Filing Dt:	09/12/2002
Publication #:	US20030010357	Pub Dt:	01/16/2003
Title:	WAFER CLEANING

54

Patent #:	6684891	Issue Dt:	02/03/2004	Application #:	10243486	Filing Dt:	09/12/2002
Publication #:	US20030015218	Pub Dt:	01/23/2003
Title:	WAFER CLEANING

55

Patent #:	6626189	Issue Dt:	09/30/2003	Application #:	10304583	Filing Dt:	11/25/2002
Publication #:	US20030111092	Pub Dt:	06/19/2003
Title:	METHOD OF PROCESSING SUBSTRATES USING PRESSURIZED MIST GENERATION

56

Patent #:	7104268	Issue Dt:	09/12/2006	Application #:	10341425	Filing Dt:	01/10/2003
Publication #:	US20040134514	Pub Dt:	07/15/2004
Title:	MEGASONIC CLEANING SYSTEM WITH BUFFERED CAVITATION METHOD

57

Patent #:	6907890	Issue Dt:	06/21/2005	Application #:	10358636	Filing Dt:	02/05/2003
Publication #:	US20030145874	Pub Dt:	08/07/2003
Title:	CAPILLARY DRYING OF SUBSTRATES

58

Patent #:	6818563	Issue Dt:	11/16/2004	Application #:	10366054	Filing Dt:	02/13/2003
Publication #:	US20030136334	Pub Dt:	07/24/2003
Title:	PROCESS AND APPARATUS FOR REMOVAL OF PHOTORESIST FROM SEMICONDUCTOR WAFERS USING SPRAY NOZZLES

59

Patent #:	7976718	Issue Dt:	07/12/2011	Application #:	10585229	Filing Dt:	04/20/2007
Publication #:	US20080035609	Pub Dt:	02/14/2008
Title:	SYSTEM AND METHOD FOR SELECTIVE ETCHING OF SILICON NITRIDE DURING SUBSTRATE PROCESSING

60

Patent #:	6863836	Issue Dt:	03/08/2005	Application #:	10634440	Filing Dt:	08/05/2003
Publication #:	US20040035442	Pub Dt:	02/26/2004
Title:	METHOD FOR REMOVAL OF PHOTORESIST USING SPARGER

61

Patent #:	6955727	Issue Dt:	10/18/2005	Application #:	10699042	Filing Dt:	10/31/2003
Publication #:	US20040149308	Pub Dt:	08/05/2004
Title:	SUBSTRATE PROCESS TANK WITH ACOUSTICAL SOURCE TRANSMISSION AND METHOD OF PROCESSING SUBSTRATES

62

Patent #:	7117876	Issue Dt:	10/10/2006	Application #:	10726774	Filing Dt:	12/03/2003
Publication #:	US20040206371	Pub Dt:	10/21/2004
Title:	METHOD OF CLEANING A SIDE OF A THIN FLAT SUBSTRATE BY APPLYING SONIC ENERGY TO THE OPPOSITE SIDE OF THE SUBSTRATE

63

Patent #:	7047989	Issue Dt:	05/23/2006	Application #:	10742214	Filing Dt:	12/19/2003
Publication #:	US20040139982	Pub Dt:	07/22/2004
Title:	SONIC-ENERGY CLEANER SYSTEM WITH GASIFIED FLUID

64

Patent #:	6892738	Issue Dt:	05/17/2005	Application #:	10760596	Filing Dt:	01/20/2004
Publication #:	US20040168707	Pub Dt:	09/02/2004
Title:	APPARATUS AND METHODS FOR REDUCING DAMAGE TO SUBSTRATES DURING MEGASONIC CLEANING PROCESSES

65

Patent #:	7100304	Issue Dt:	09/05/2006	Application #:	10864927	Filing Dt:	06/10/2004
Publication #:	US20040221473	Pub Dt:	11/11/2004
Title:	MEGASONIC CLEANER AND DRYER

66

Patent #:	7156111	Issue Dt:	01/02/2007	Application #:	10864929	Filing Dt:	06/10/2004
Publication #:	US20050161059	Pub Dt:	07/28/2005
Title:	MEGASONIC CLEANING USING SUPERSATURATED CLEANING SOLUTION

67

Patent #:	7311847	Issue Dt:	12/25/2007	Application #:	10895511	Filing Dt:	07/20/2004
Publication #:	US20050016929	Pub Dt:	01/27/2005
Title:	SYSTEM AND METHOD FOR POINT-OF-USE FILTRATION AND PURIFICATION OF FLUIDS USED IN SUBSTRATE PROCESSING

68

Patent #:	7169253	Issue Dt:	01/30/2007	Application #:	10909764	Filing Dt:	08/02/2004
Publication #:	US20050026435	Pub Dt:	02/03/2005
Title:	PROCESS SEQUENCE FOR PHOTORESIST STRIPPING AND/OR CLEANING OF PHOTOMASKS FOR INTEGRATED CIRCUIT MANUFACTURING

69

Patent #:	6928750	Issue Dt:	08/16/2005	Application #:	10951009	Filing Dt:	09/27/2004
Publication #:	US20050087303	Pub Dt:	04/28/2005
Title:	MEMBRANE DRYER

70

Patent #:	7268469	Issue Dt:	09/11/2007	Application #:	11375907	Filing Dt:	03/15/2006
Publication #:	US20060180186	Pub Dt:	08/17/2006
Title:	TRANSDUCER ASSEMBLY FOR MAGASONIC PROCESSING OF AN ARTICLE AND APPARATUS UTILIZING THE SAME

71

Patent #:	7211932	Issue Dt:	05/01/2007	Application #:	11386634	Filing Dt:	03/22/2006
Publication #:	US20060175935	Pub Dt:	08/10/2006
Title:	APPARATUS FOR MEGASONIC PROCESSING OF AN ARTICLE

72

Patent #:	NONE	Issue Dt:		Application #:	11454447	Filing Dt:	06/15/2006
Publication #:	US20060286808	Pub Dt:	12/21/2006
Title:	System and method of processing substrates using sonic energy having cavitation control

73

Patent #:	NONE	Issue Dt:		Application #:	11544802	Filing Dt:	10/06/2006
Publication #:	US20070084481	Pub Dt:	04/19/2007
Title:	System and method of cleaning substrates using a subambient process solution

74

Patent #:	7578302	Issue Dt:	08/25/2009	Application #:	11595029	Filing Dt:	11/09/2006
Publication #:	US20070056605	Pub Dt:	03/15/2007
Title:	MEGASONIC CLEANING USING SUPERSATURATED SOLUTION

75

Patent #:	7644512	Issue Dt:	01/12/2010	Application #:	11624445	Filing Dt:	01/18/2007
Title:	SYSTEMS AND METHODS FOR DRYING A ROTATING SUBSTRATE

76

Patent #:	7784478	Issue Dt:	08/31/2010	Application #:	11625556	Filing Dt:	01/22/2007
Publication #:	US20070169800	Pub Dt:	07/26/2007
Title:	ACOUSTIC ENERGY SYSTEM, METHOD AND APPARATUS FOR PROCESSING FLAT ARTICLES

77

Patent #:	NONE	Issue Dt:		Application #:	11625651	Filing Dt:	01/22/2007
Publication #:	US20070170812	Pub Dt:	07/26/2007
Title:	SYSTEM APPARATUS AND METHODS FOR PROCESSING SUBSTRATES USING ACOUSTIC ENERGY

78

Patent #:	NONE	Issue Dt:		Application #:	11640718	Filing Dt:	12/18/2006
Publication #:	US20070144556	Pub Dt:	06/28/2007
Title:	Reciprocating megasonic probe

79

Patent #:	NONE	Issue Dt:		Application #:	11649535	Filing Dt:	01/04/2007
Publication #:	US20070123052	Pub Dt:	05/31/2007
Title:	Process sequence for photoresist stripping and cleaning of photomasks for integrated circuit manufacturing

80

Patent #:	7946299	Issue Dt:	05/24/2011	Application #:	11745866	Filing Dt:	05/08/2007
Publication #:	US20070261716	Pub Dt:	11/15/2007
Title:	SPRAY JET CLEANING APPARATUS AND METHOD

81

Patent #:	NONE	Issue Dt:		Application #:	11755619	Filing Dt:	05/30/2007
Publication #:	US20080169007	Pub Dt:	07/17/2008
Title:	APPARATUS AND METHOD FOR PROCESSING A HYDROPHOBIC SURFACE OF A SUBSTRATE

82

Patent #:	NONE	Issue Dt:		Application #:	11777252	Filing Dt:	07/12/2007
Publication #:	US20080017219	Pub Dt:	01/24/2008
Title:	TRANSDUCER ASSEMBLY INCORPORATING A TRANSMITTER HAVING THROUGH HOLES, AND METHOD AND SYSTEM FOR CLEANING A SUBSTRATE UTILIZING THE SAME

83

Patent #:	7990289	Issue Dt:	08/02/2011	Application #:	11777256	Filing Dt:	07/12/2007
Publication #:	US20090016453	Pub Dt:	01/15/2009
Title:	COMBINATORIAL CODING/DECODING FOR ELECTRICAL COMPUTERS AND DIGITAL DATA PROCESSING SYSTEMS

84

Patent #:	7938131	Issue Dt:	05/10/2011	Application #:	11781835	Filing Dt:	07/23/2007
Publication #:	US20080178911	Pub Dt:	07/31/2008
Title:	APPARATUS FOR EJECTING FLUID ONTO A SUBSTRATE AND SYSTEM AND METHOD INCORPORATING THE SAME

85

Patent #:	7836769	Issue Dt:	11/23/2010	Application #:	11837292	Filing Dt:	08/10/2007
Publication #:	US20080034875	Pub Dt:	02/14/2008
Title:	APPARATUS AND METHOD OF MEASURING ACOUSTICAL ENERGY APPLIED TO A SUBSTRATE

86

Patent #:	NONE	Issue Dt:		Application #:	11841427	Filing Dt:	08/20/2007
Publication #:	US20080087304	Pub Dt:	04/17/2008
Title:	SYSTEM AND METHOD FOR PROCESSING A SUBSTRATE UTILIZING A GAS STREAM FOR PARTICLE REMOVAL

87

Patent #:	7614406	Issue Dt:	11/10/2009	Application #:	11873750	Filing Dt:	10/17/2007
Publication #:	US20080264442	Pub Dt:	10/30/2008
Title:	METHOD OF CLEANING SUBSTRATES UTILIZING MEGASONIC ENERGY

88

Patent #:	8741066	Issue Dt:	06/03/2014	Application #:	12070620	Filing Dt:	02/19/2008
Publication #:	US20110306210	Pub Dt:	12/15/2011
Title:	Method for cleaning substrates utilizing surface passivation and/or oxide layer growth to protect from pitting

Assignors

1

PNC BANK, NATIONAL ASSOCIATION

Exec Dt:

09/26/2008

2

BHC INTERIM FUNDING II, L.P.

Exec Dt:

09/26/2008

3

Exec Dt:

09/26/2008

4

GOLDFINGER TECHNOLOGIES, LLC

Exec Dt:

09/26/2008

5

AKRION TECHNOLOGIES, INC.

Exec Dt:

09/26/2008

6

SCP SERVICES, INC. (F/K/A AKRION SCP ACQUISITION CORP.)

Exec Dt:

09/26/2008

Assignee

1

WAFER HOLDINGS, INC.

6330 HEDGEWOOD DRIVE

ALLENTOWN, PENNSYLVANIA 18106

Correspondence name and address
	THOMAS J. BUETTNER
	LATHAM & WATKINS LLP
	233 S. WACKER DRIVE, SUITE 5800
	CHICAGO, IL 60606

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