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Patent Assignment Details
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Reel/Frame:021762/0567   Pages: 3
Recorded: 10/23/2008
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12226610
Filing Dt:
10/23/2008
Publication #:
Pub Dt:
04/02/2009
Title:
Film Deposition Method, Film Deposition Apparatus, and Storage Medium
Assignors
1
Exec Dt:
09/13/2008
2
Exec Dt:
08/18/2008
3
Exec Dt:
08/20/2008
4
Exec Dt:
08/13/2008
5
Exec Dt:
08/18/2008
Assignee
1
3-1, AKASAKA 5-CHOME
MINATO-KU, TOKYO-TO, JAPAN
Correspondence name and address
MICHAEL A. MAKUCH
SMITH, GAMBRELL & RUSSELL, LLP
1130 CONNECTICUT AVENUE
SUITE 1130
WASHINGTON, DC 20036

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