Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 021805/0378 | |
| Pages: | 8 |
| | Recorded: | 11/10/2008 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
9
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Patent #:
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Issue Dt:
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08/13/2002
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Application #:
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09634988
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Filing Dt:
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08/08/2000
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Title:
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PLASMA VACUUM SUBSTRATE TREATMENT PROCESS AND SYSTEM
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10516455
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Filing Dt:
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12/03/2004
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Publication #:
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Pub Dt:
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03/23/2006
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Title:
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Method and device for substrate etching with very high power inductively coupled plasma
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10516457
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Filing Dt:
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12/03/2004
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Publication #:
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Pub Dt:
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10/13/2005
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Title:
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Heating jacket for plasma etching reactor, and etching method using same
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Patent #:
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Issue Dt:
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06/06/2006
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Application #:
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10902582
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Filing Dt:
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07/30/2004
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Publication #:
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Pub Dt:
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02/03/2005
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Title:
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METHOD AND APPARATUS FOR NON-AGGRESSIVE PLASMA-ENHANCED VAPOR DEPOSITION OF DIELECTRIC FILMS
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11219651
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Filing Dt:
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09/07/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Title:
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Thin substrate support
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11319506
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Filing Dt:
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12/29/2005
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Publication #:
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Pub Dt:
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08/10/2006
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Title:
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APPARATUS AND A METHOD FOR CONTROLLING THE DEPTH OF ETCHING DURING ALTERNATING PLASMA ETCHING OF SEMICONDUCTOR SUBSTRATES
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11372118
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Filing Dt:
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03/10/2006
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Publication #:
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Pub Dt:
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08/24/2006
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Title:
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Method and apparatus for non-aggressive plasma-enhanced vapor deposition of dielectric films
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Patent #:
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Issue Dt:
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07/15/2008
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Application #:
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11451443
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Filing Dt:
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06/13/2006
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Publication #:
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Pub Dt:
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12/14/2006
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Title:
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METHOD OF CONTROLLING THE PRESSURE IN A PROCESS CHAMBER
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11669028
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Filing Dt:
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01/30/2007
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Publication #:
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Pub Dt:
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08/23/2007
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Title:
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ANISOTROPIC ETCHING METHOD
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Assignee
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| 2201 S. MCDOWELL BOULEVARD |
| PETALUMA, CALIFORNIA 94954 |
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Correspondence name and address
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FLIESLER MEYER LLP
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650 CALIFORNIA STREET, 14TH FLOOR
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SAN FRANCISCO, CA 94108
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