Patent Assignment Details
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| Reel/Frame: | 021806/0145 | |
| Pages: | 2 |
| | Recorded: | 11/07/2008 | | |
| Attorney Dkt #: | 026531-016300US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/28/2012
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Application #:
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12267267
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Filing Dt:
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11/07/2008
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Publication #:
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Pub Dt:
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05/14/2009
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Title:
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TEMPERATURE MEASUREMENT IN A SUBSTRATE PROCESSING APPARATUS
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Assignee
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| K-I SHIJO BUILDING, 88 KANKOBOKO-CHO |
| SHIJODORI-MUROMACHI-HIGASHIIRU, SHIMOGYO-KU |
| KYOTO, JAPAN 600-8009 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111
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