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Reel/Frame:021830/0599   Pages: 4
Recorded: 11/13/2008
Attorney Dkt #:334477US26
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
09/02/2014
Application #:
12268649
Filing Dt:
11/11/2008
Publication #:
Pub Dt:
06/04/2009
Title:
BEVEL/BACKSIDE POLYMER REMOVING METHOD AND DEVICE, SUBSTRATE PROCESSING APPARATUS AND STORAGE MEDIUM
Assignors
1
Exec Dt:
09/26/2008
2
Exec Dt:
09/26/2008
3
Exec Dt:
09/26/2008
4
Exec Dt:
09/26/2008
Assignee
1
AKASAKA BIZ TOWER, 3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
RONALD TURNER
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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