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Reel/Frame:021835/0737   Pages: 3
Recorded: 11/14/2008
Attorney Dkt #:334375US26PCT
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
02/08/2011
Application #:
12300135
Filing Dt:
11/10/2008
Publication #:
Pub Dt:
07/16/2009
Title:
SUBSTRATE PROCESSING METHOD, PROGRAM, COMPUTER-READABLE STORAGE MEDIUM, AND SUBSTRATE PROCESSING SYSTEM
Assignors
1
Exec Dt:
09/29/2008
2
Exec Dt:
09/22/2008
3
Exec Dt:
09/24/2008
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
OBLON, SPIVAK, ET AL.
1940 DUKE STREET
ALEXANDRIA, VA 22314

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