Patent Assignment Details
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| Reel/Frame: | 021863/0729 | |
| Pages: | 8 |
| | Recorded: | 11/19/2008 | | |
| Attorney Dkt #: | ASMEX.618A |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/01/2011
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Application #:
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12273440
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Filing Dt:
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11/18/2008
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Publication #:
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Pub Dt:
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06/11/2009
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Title:
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CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESSING CHAMBER
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Assignee
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| 3440 EAST UNIVERSITY DRIVE |
| PHOENIX, ARIZONA 85034-7200 |
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Correspondence name and address
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KNOBBE, MARTENS, OLSON & BEAR, LLP
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2040 MAIN STREET, 14TH FLOOR
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IRVINE, CALIFORNIA 92614
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