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Patent Assignment Details
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Reel/Frame:021938/0962   Pages: 4
Recorded: 12/08/2008
Attorney Dkt #:1857.678-0 & 678-1
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 2
1
Patent #:
Issue Dt:
06/05/2001
Application #:
09275360
Filing Dt:
03/23/1999
Title:
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
2
Patent #:
Issue Dt:
10/18/2005
Application #:
09874073
Filing Dt:
06/04/2001
Publication #:
Pub Dt:
11/22/2001
Title:
PLASMA DEPOSITION OF SPIN CHUCKS TO REDUCE CONTAMINATION OF SILICON WAFERS
Assignor
1
Exec Dt:
09/09/2003
Assignee
1
DE RUN 1110
NL-5503 LA VELDHOVEN, NETHERLANDS
Correspondence name and address
STERNE, KESSLER, GOLDSTEIN & FOX PLLC
1100 NEW YORK AVENUE, NW
WASHINGTON, DC 20005

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