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Patent #:
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Issue Dt:
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01/08/1991
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Application #:
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07271878
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Filing Dt:
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11/16/1988
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Title:
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METHOD FOR FABRICATING A SILICON CARBIDE SUBSTRATE
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Patent #:
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Issue Dt:
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06/12/1990
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Application #:
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07286290
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Filing Dt:
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12/19/1988
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Title:
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METHOD OF MAKING HIGH SPEED SEMICONDUCTOR DEVICE HAVING A SILICON-ON- INSULATOR STRUCTURE
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Patent #:
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Issue Dt:
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04/10/1990
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Application #:
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07304318
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Filing Dt:
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01/31/1989
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Title:
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SEMICONDUCTOR MEMORY DEVICE HAVING FUNCTION OF GENERATING WRITE SIGNAL INTERNALLY
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Patent #:
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Issue Dt:
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05/29/1990
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Application #:
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07310347
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Filing Dt:
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02/14/1989
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Title:
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MAGNETIC OBJECT LENS FOR AN ELECTRON BEAM EXPOSURE APPARATUS WHICH PROCESSES A WAFER CARRIED ON A CONTINUOUSLY MOVING STAGE
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Patent #:
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Issue Dt:
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06/23/1992
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Application #:
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07313883
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Filing Dt:
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02/23/1989
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Title:
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INTER-CONFIGURATION CHANGING CONTROLLOR BASED UPON THE CONNECTION AND CONFIGURATION INFORMATION AMONG PLURALITY OF CLUSTERS AND THE GLOBAL STORAGE
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Patent #:
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Issue Dt:
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01/21/1992
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Application #:
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07314794
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Filing Dt:
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02/24/1989
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Title:
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METHOD OF FABRICATING AN X-RAY EXPOSURE MASK
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Patent #:
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Issue Dt:
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12/26/1989
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Application #:
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07321201
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Filing Dt:
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03/09/1989
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Title:
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METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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06/11/1991
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Application #:
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07327728
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Filing Dt:
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03/23/1989
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Title:
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PHOTO-CATHODE IMAGE PROJECTION APPARATUS FOR PATTERNING A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/25/1990
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Application #:
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07329833
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Filing Dt:
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03/28/1989
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Title:
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CHARGED PARTICLE BEAM EXPOSURE SYSTEM USING LINE BEAMS
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Patent #:
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Issue Dt:
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10/30/1990
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Application #:
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07333414
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Filing Dt:
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04/05/1989
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Title:
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PROCESS FOR FORMING DICING LINES ON WAFER
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Patent #:
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Issue Dt:
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05/22/1990
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Application #:
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07344405
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Filing Dt:
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04/28/1989
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Title:
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REFERENCE LESS ECL LOGIC CIRCUIT
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Patent #:
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Issue Dt:
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06/12/1990
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Application #:
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07349076
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Filing Dt:
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05/09/1989
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Title:
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GATE ARRAY DEVICE HAVING MACRO CELLS FOR FORMING MASTER AND SLAVE CELLS OF MASTER-SLAVE FLIP-FLOP CIRCUIT
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Patent #:
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Issue Dt:
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03/19/1991
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Application #:
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07349251
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Filing Dt:
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05/09/1989
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Title:
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MASTER-SLAVE FLIP-FLOP CIRCUIT
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Patent #:
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Issue Dt:
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10/15/1991
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Application #:
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07357809
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Filing Dt:
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05/30/1989
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Title:
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SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING SAME
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Patent #:
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Issue Dt:
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06/18/1991
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Application #:
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07362222
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Filing Dt:
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06/07/1989
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Title:
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METAL INSULATOR SEMICONDUCTOR TYPE DYNAMIC RANDOM ACCESS MEMORY DEVICE
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Patent #:
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Issue Dt:
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01/14/1992
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Application #:
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07366486
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Filing Dt:
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06/15/1989
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Title:
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METHOD OF FORMING SEMICONDUCTOR INTEGRATED CIRCUIT USING MASTER SLICE APPROACH
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Patent #:
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Issue Dt:
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08/27/1991
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Application #:
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07369051
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Filing Dt:
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06/20/1989
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Title:
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COLOR IMAGE DISPLAY CONTROL APPARATUS WITH CORRECTION OF PHASE DIFFERENCE IN SAMPLING CLOCK
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Patent #:
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Issue Dt:
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01/01/1991
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Application #:
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07369075
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Filing Dt:
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06/20/1989
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Title:
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COMPOSITE VIDEO SIGNAL GENERATION METHOD AND DEVICE
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Patent #:
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Issue Dt:
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06/18/1991
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Application #:
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07403355
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Filing Dt:
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09/06/1989
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Title:
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CONTINUOUS SEMICONDUCTOR SUBSTRATE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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02/19/1991
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Application #:
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07420465
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Filing Dt:
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10/12/1989
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Title:
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METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE HAVING A SILICON CARBIDE LAYER
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Patent #:
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Issue Dt:
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07/30/1991
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Application #:
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07424733
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Filing Dt:
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10/20/1989
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Title:
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FABRICATION METHOD FOR SEMICONDUCTOR DEVICES AND TRANSPARENT MASK FOR CHARGED PARTICLE BEAM
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Patent #:
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Issue Dt:
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01/21/1992
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Application #:
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07425013
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Filing Dt:
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10/23/1989
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD
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Patent #:
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Issue Dt:
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11/26/1991
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Application #:
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07426755
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Filing Dt:
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10/26/1989
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Title:
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PROCESS FOR PRODUCTION OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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09/24/1991
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Application #:
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07429500
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Filing Dt:
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10/31/1989
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND A METHOD THEREOF
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Patent #:
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Issue Dt:
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09/21/1993
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Application #:
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07433334
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Filing Dt:
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11/08/1988
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Title:
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METHOD AND APPARATUS FOR FORMING LAYOUT PATTERN OF SEMICONDUCTOR INTEGRATED CIRCUIT
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Patent #:
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Issue Dt:
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02/26/1991
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Application #:
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07441616
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Filing Dt:
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11/27/1989
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Title:
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IRRADIATION EQUIPMENT FOR APPLYING SYNCHROTRON RADIATION
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Patent #:
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Issue Dt:
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11/19/1991
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Application #:
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07447524
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Filing Dt:
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12/07/1989
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Title:
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SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR-ON-INSULATOR STRUCTURE
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Patent #:
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Issue Dt:
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07/02/1991
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Application #:
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07452589
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Filing Dt:
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12/19/1989
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Title:
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WAFER POSITIONING MECHANISM USING A NOTCH FORMED ON THE WAFER PERIPHERY
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Patent #:
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Issue Dt:
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01/12/1993
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Application #:
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07466939
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Filing Dt:
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01/18/1990
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Title:
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MANUFACTURING METHOD OF AN X-RAY EXPOSURE MASK
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Patent #:
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Issue Dt:
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11/19/1991
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Application #:
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07468083
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Filing Dt:
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01/22/1990
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Title:
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RESIST MATERIAL FOR ENERGY BEAM LITHOGRAPHY AND METHOD OF USING THE SAME
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Patent #:
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Issue Dt:
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04/02/1991
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Application #:
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07489224
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Filing Dt:
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03/06/1990
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Title:
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METHOD AND APPARATUS FOR DETECTING ALIGNMENT MARK OF SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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12/03/1991
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Application #:
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07492126
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Filing Dt:
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03/13/1990
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Title:
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SPIN COATING APPARATUS FOR FORMING A PHOTORESIST FILM OVER A SUBSTRATE HAVING A NON-CIRCULAR OUTER SHAPE
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Patent #:
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Issue Dt:
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01/07/1992
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Application #:
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07492139
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Filing Dt:
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03/13/1990
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Title:
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SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS
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Patent #:
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Issue Dt:
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06/02/1992
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Application #:
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07493395
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Filing Dt:
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03/14/1990
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Title:
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DYNAMIC RANDOM ACCESS MEMORY HAVING IMPROVED WORD LINE CONTROL
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Patent #:
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Issue Dt:
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04/02/1991
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Application #:
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07496010
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Filing Dt:
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03/20/1990
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Title:
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PATTERN FORMING METHOD
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Patent #:
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Issue Dt:
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09/29/1992
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Application #:
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07508556
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Filing Dt:
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04/13/1990
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Title:
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PROCESSING APPARATUS AT REDUCED PRESSURE AND VALVE USED THEREFOR
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Patent #:
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Issue Dt:
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03/26/1991
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Application #:
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07510890
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Filing Dt:
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04/18/1990
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Title:
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METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE INCLUDING THE STEP OF FORMING AN ALIGNMENT MARK
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Patent #:
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Issue Dt:
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09/01/1992
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Application #:
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07525062
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Filing Dt:
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05/18/1990
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Title:
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BLANKING APERTURE ARRAY, METHOD OF PRODUCING BLANKING APERTURE ARRAY, CHARGED PARTICLE BEAM EXPOSURE APPARATUS AND CHARGED PARTICLE BEAM EXPOSURE METHOD
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Patent #:
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Issue Dt:
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09/03/1991
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Application #:
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07553389
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Filing Dt:
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07/17/1990
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Title:
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FABRICATION METHOD OF A BIMOS SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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02/25/1992
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Application #:
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07554369
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Filing Dt:
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07/19/1990
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Title:
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PROCESS AND APPARATUS FOR CHEMICAL VAPOR DEPOSITION
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Patent #:
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Issue Dt:
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12/22/1992
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Application #:
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07585777
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Filing Dt:
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09/20/1990
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Title:
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CHARGED PARTICLE BEAM LITHOGRAPHY SYSTEM AND METHOD THEREOF
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Patent #:
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Issue Dt:
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06/23/1992
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Application #:
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07587557
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Filing Dt:
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09/24/1990
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Title:
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INSPECTION METHOD OF PHOTOMASK RETICLE FOR SEMICONDUCTOR DEVICE FABRICATION
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Patent #:
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Issue Dt:
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06/30/1992
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Application #:
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07587685
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Filing Dt:
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09/25/1990
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Title:
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DETECTION CIRCUIT FOR AMPLITUDE MODULATED SIGNALS
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Patent #:
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Issue Dt:
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04/14/1992
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Application #:
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07605351
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Filing Dt:
|
10/30/1990
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Title:
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RESIST MATERIAL FOR ENERGY BEAM LITHOGRAPHY AND METHOD OF USING THE SAME
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Patent #:
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Issue Dt:
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11/10/1992
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Application #:
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07611695
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Filing Dt:
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11/13/1990
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Title:
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AMPLIFIER CIRCUIT HAVING A FEEDBACK CIRCUIT
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Patent #:
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Issue Dt:
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07/07/1992
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Application #:
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07622199
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Filing Dt:
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12/05/1990
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Title:
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DIODE LIMITER
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07622597
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Filing Dt:
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12/05/1990
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Title:
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METHOD OF REMOVING A PATTERNED MULTILEVEL RESIST FROM A SURFACE LAYER ON A SUBSTRATE
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Patent #:
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Issue Dt:
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11/19/1991
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Application #:
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07637152
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Filing Dt:
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01/03/1991
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Title:
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METHOD OF FORMING WIRING OF A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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01/18/1994
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Application #:
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07656501
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Filing Dt:
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02/19/1991
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Title:
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SIGNATURE CIRCUIT FOR NON-VOLATILE MEMORY DEVICE
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Patent #:
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Issue Dt:
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03/08/1994
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Application #:
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07656502
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Filing Dt:
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02/19/1991
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Title:
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WRITE CIRCUIT FOR NON-VOLATILE MEMORY DEVICE
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Patent #:
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Issue Dt:
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06/09/1992
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Application #:
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07659475
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Filing Dt:
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02/25/1991
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Title:
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SEMICONDUCTOR DEVICE HAVING A SIDE WALL FILM
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Patent #:
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Issue Dt:
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04/14/1992
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Application #:
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07666567
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Filing Dt:
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03/08/1991
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Title:
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METHOD OF FORMING FINE RESIST PATTERN IN ELECTRON BEAM OR X-RAY LITHOGRAPHY
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Patent #:
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Issue Dt:
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03/24/1992
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Application #:
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07669988
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Filing Dt:
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03/15/1991
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Title:
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CHARGED PARTICLE BEAM EXPOSURE METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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09/29/1992
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Application #:
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07685153
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Filing Dt:
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04/10/1991
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Title:
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SEMICONDUCTOR DEVICE COMPRISING HIGH-SPEED AND HIGH-CURRENT TRANSISTORS FORMED IN A COMMON SUBSTRATE AND MATCHED CHARACTERISTICS
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Patent #:
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Issue Dt:
|
06/01/1993
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Application #:
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07685678
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Filing Dt:
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04/16/1991
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Title:
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BLANKING APERTURE ARRAY AND METHOD OF PRODUCING SAME
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Patent #:
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Issue Dt:
|
09/15/1992
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Application #:
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07704048
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Filing Dt:
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05/22/1991
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Title:
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CELL ARRAY OF A NON-VOLATILE SEMICONDUCTOR MEMORY DEVICES
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Patent #:
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Issue Dt:
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10/27/1992
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Application #:
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07707826
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Filing Dt:
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05/30/1991
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Title:
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SWITCHING CIRCUIT HAVING CONSTANT IMPEDANCE REGARDLESS SWITCHING OPERATION THEREOF
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Patent #:
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Issue Dt:
|
08/09/1994
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Application #:
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07708990
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Filing Dt:
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05/31/1991
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Title:
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EXPOSURE DATA FORMING METHOD, PATTERN FORMING METHOD, PATTERN EXPOSURE METHOD AND PATTERN EXPOSURE APPARATUS
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Patent #:
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Issue Dt:
|
04/14/1992
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Application #:
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07718378
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Filing Dt:
|
06/20/1991
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
|
05/26/1992
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Application #:
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07718380
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Filing Dt:
|
06/20/1991
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM HAVING AN IMPROVED SEAL ELEMENT FOR INTERFACING ELECTRIC CONNECTIONS
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Patent #:
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Issue Dt:
|
02/22/1994
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Application #:
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07718433
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Filing Dt:
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06/20/1991
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Title:
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STENCIL MASK AND CHARGED PARTICLE BEAM EXPOSURE METHOD AND APPARATUS USING THE STENCIL MASK
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Patent #:
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Issue Dt:
|
06/29/1993
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Application #:
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07724338
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Filing Dt:
|
07/05/1991
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Title:
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MASK FOR USE IN A CHARGED PARTICLE BEAM APPARATUS INCLUDING BEAM PASSING SECTIONS
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Patent #:
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Issue Dt:
|
07/21/1992
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Application #:
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07746158
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Filing Dt:
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08/14/1991
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Title:
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LSI GATE ARRAY HAVING REDUCED SWITCHING NOISE
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Patent #:
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Issue Dt:
|
06/21/1994
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Application #:
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07747977
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Filing Dt:
|
08/21/1991
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Title:
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SEMICONDUCTOR DEVICE WITH BURIED CONDUCTOR AND INTERCONNECTION LAYERS
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Patent #:
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Issue Dt:
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07/27/1993
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Application #:
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07748955
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Filing Dt:
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08/20/1991
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Title:
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METHOD OF DEPOSITING INSULATING LAYER ON UNDERLYING LAYER USING PLASMA-ASSISTED CVD PROCESS USING PULSE-MODULATED PLASMA
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07751094
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Filing Dt:
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08/28/1991
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Title:
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IC PACKAGE WITH ELECTRIC CONDUCTOR LINES IN DIELECTRIC PACKAGE BODY
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07751588
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Filing Dt:
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08/22/1991
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Title:
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METHOD AND APPARATUS FOR CONTROLLING CHARGED PARTICLE BEAMS IN CHARGED PARTICLE BEAM EXPOSURE SYSTEM
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Patent #:
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Issue Dt:
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01/19/1993
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Application #:
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07761454
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Filing Dt:
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09/18/1991
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM HAVING THE CAPABILITY OF CHECKING THE PATTERN OF AN ELECTRON MASK USED FOR SHAPING AN ELECTRON BEAM
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Patent #:
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Issue Dt:
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06/01/1993
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Application #:
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07761458
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Filing Dt:
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09/18/1991
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Title:
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REFERENCE DELAY GENERATOR AND ELECTRONIC DEVICE USING THE SAME
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Patent #:
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Issue Dt:
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09/14/1993
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Application #:
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07762359
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Filing Dt:
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09/19/1991
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Title:
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METHOD FOR DEPOSITING THIN FILM ON SUBSTRATE BY SPUTTERING PROCESS
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Patent #:
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Issue Dt:
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03/23/1993
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Application #:
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07766132
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Filing Dt:
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09/27/1991
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Title:
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DATA DRIVER CIRCUIT OF LIQUID CRYSTAL DISPLAY FOR ACHIEVING DIGITAL GRAY-SCALE
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Patent #:
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Issue Dt:
|
09/15/1992
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Application #:
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07769343
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Filing Dt:
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10/02/1991
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Title:
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ELECTRON BEAM EXPOSURE DEVICE AND EXPOSURE METHOD USING THE SAME
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Patent #:
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Issue Dt:
|
12/29/1992
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Application #:
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07782251
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Filing Dt:
|
10/25/1991
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Title:
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ELECTRON BEAM EXPOSURE SYSTEM WITH INCREASED EFFICIENCY OF EXPOSURE OPERATION
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Patent #:
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Issue Dt:
|
12/29/1992
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Application #:
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07789192
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Filing Dt:
|
11/08/1991
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Title:
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PROCESS FOR FABRICATING AN INTEGRATED CIRCUIT BY A REPETITION OF EXPOSURE OF A SEMICONDUCTOR PATTERN
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|
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Patent #:
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Issue Dt:
|
05/23/1995
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Application #:
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07810750
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Filing Dt:
|
12/19/1991
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|
Title:
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SEMICONDUCTOR INTEGRATED CIRCUIT HAVING TEST CIRCUIT
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Patent #:
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Issue Dt:
|
08/31/1993
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Application #:
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07812918
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Filing Dt:
|
12/26/1991
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|
Title:
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LEVEL CONVERSION CIRCUIT HAVING IMPROVED CONTROL AND SPEED OF SWITCHING FROM HIGH TO LOW LEVEL CONVERTED OUTPUTS
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|
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Patent #:
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|
Issue Dt:
|
01/05/1993
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Application #:
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07817074
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Filing Dt:
|
01/06/1992
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|
Title:
|
CHARGED PARTICLE BEAM EXPOSURE DEVICE FOR IMPROVING THE HEATING STATE OF BLOCK MASK
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|
|
|
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Patent #:
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|
Issue Dt:
|
11/23/1993
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Application #:
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07824913
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Filing Dt:
|
01/23/1992
|
|
Title:
|
INSULATED-GATE FET ON AN SOI-STRUCTURE
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|
|
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Patent #:
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|
Issue Dt:
|
10/05/1993
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Application #:
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07825255
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Filing Dt:
|
01/24/1992
|
|
Title:
|
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
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|
|
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Patent #:
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|
Issue Dt:
|
08/17/1993
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Application #:
|
07833003
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Filing Dt:
|
02/10/1992
|
|
Title:
|
METHOD OF PRODUCING SEMICONDUCTOR DEVICE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
01/30/1996
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Application #:
|
07833412
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Filing Dt:
|
02/10/1992
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|
Title:
|
CACHE MEMORY AND DATA PROCEEOR INCLUDING INTRUCTION LENGTH DECODING CIRCUITRY FOR SIMULTANEOUSLY DECODING A PLURALITY OF VARIABLE LENGHTH INSTRUCTIONS
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|
|
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|
Patent #:
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|
Issue Dt:
|
06/28/1994
|
Application #:
|
07846008
|
Filing Dt:
|
03/04/1992
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|
Title:
|
NON-VOLATILE MEMORY, SEMICONDUCTOR MEMORY DEVICE HAVING THE NON-VOLATILE MEMORY
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|
|
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|
Patent #:
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|
Issue Dt:
|
10/05/1993
|
Application #:
|
07849353
|
Filing Dt:
|
03/11/1992
|
|
Title:
|
SEMICONDUCTOR MEMORY DEVICE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
03/22/1994
|
Application #:
|
07851208
|
Filing Dt:
|
03/13/1992
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|
Title:
|
METHOD AND APPARATUS FOR A SEMICONDUCTOR DEVICE HAVING A RADIATION PART
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/09/1993
|
Application #:
|
07851400
|
Filing Dt:
|
03/13/1992
|
|
Title:
|
CHARGED PARTICLE BEAM EXPOSURE SYSTEM AND CHARGED PARTICLE BEAM EXPOSURE METHOD
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/02/1994
|
Application #:
|
07853788
|
Filing Dt:
|
03/19/1992
|
|
Title:
|
MULTIPORT MEMORY
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/19/1993
|
Application #:
|
07854086
|
Filing Dt:
|
03/19/1992
|
|
Title:
|
METHOD AND APPARATUS FOR MAKING CHARGED PARTICLE BEAM EXPOSURE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
09/06/1994
|
Application #:
|
07854638
|
Filing Dt:
|
08/06/1992
|
|
Title:
|
SEMICONDUCTOR MEMORY DEVICE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
03/16/1993
|
Application #:
|
07855108
|
Filing Dt:
|
03/20/1992
|
|
Title:
|
METHOD FOR WRITING A PATTERN ON AN OBJECT BY A FOCUSED ELECTRON BEAM WITH AN IMPROVED EFFICIENCY
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/27/1993
|
Application #:
|
07859109
|
Filing Dt:
|
03/27/1992
|
|
Title:
|
CAPACITOR AND METHOD OF FABRICATING SAME
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/26/1994
|
Application #:
|
07861822
|
Filing Dt:
|
06/16/1992
|
|
Title:
|
SEMICONDUCTOR MEMORY UNIT HAVING REDUNDANT STRUCTURE
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|
|
|
|
Patent #:
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|
Issue Dt:
|
11/23/1993
|
Application #:
|
07874138
|
Filing Dt:
|
04/27/1992
|
|
Title:
|
ELECTRON BEAM EXPOSURE SYSTEM HAVING AN ELECTROMAGNETIC DEFLECTOR CONFIGURED FOR EFFICIENT COOLING
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|
|
|
|
Patent #:
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|
Issue Dt:
|
08/10/1993
|
Application #:
|
07877396
|
Filing Dt:
|
04/30/1992
|
|
Title:
|
MASK FOR LITHOGRAPHIC PATTERNING AND A METHOD OF MANUFACTURING THE SAME
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|
|
|
|
Patent #:
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|
Issue Dt:
|
07/13/1993
|
Application #:
|
07880027
|
Filing Dt:
|
05/08/1992
|
|
Title:
|
METHOD FOR WIRE-BONDING AN INTEGRATED CIRCUIT
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/29/1994
|
Application #:
|
07889953
|
Filing Dt:
|
05/29/1992
|
|
Title:
|
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/1994
|
Application #:
|
07889954
|
Filing Dt:
|
05/29/1992
|
|
Title:
|
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING TERMINAL MEMBERS PROVIDED BETWEEN SEMICONDUCTOR ELEMENT AND LEADS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/17/1994
|
Application #:
|
07891154
|
Filing Dt:
|
05/28/1992
|
|
Title:
|
PROCESS FOR THE PREPARATION OF A HIGH DIELECTRIC THIN FILM USING ECR PLASMA CVD
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/19/1994
|
Application #:
|
07899270
|
Filing Dt:
|
06/16/1992
|
|
Title:
|
SURFACE-MOUNTING TYPE SEMICONDUCTOR PACKAGE HAVING AN IMPROVED EFFICIENCY FOR HEAT DISSIPATION
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/1994
|
Application #:
|
07924941
|
Filing Dt:
|
08/05/1992
|
|
Title:
|
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING EDGE TRIGGER FLIP- FLOP CIRCUIT FOR DECREASING DELAY TIME
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/11/1994
|
Application #:
|
07925110
|
Filing Dt:
|
08/06/1992
|
|
Title:
|
ELECTRON BEAM EXPOSURE PROCESS FOR WRITING A PATTERN ON AN OBJECT BY AN ELECTRON BEAM WITH A COMPENSATION OF THE PROXIMITY EFFECT
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|
