Patent Assignment Details
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Reel/Frame: | 022001/0836 | |
| Pages: | 3 |
| | Recorded: | 12/18/2008 | | |
Attorney Dkt #: | 211843-00032 CONT. 2 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11648091
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Filing Dt:
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12/29/2006
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Publication #:
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Pub Dt:
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08/09/2007
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Title:
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Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions
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Assignee
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34 SULLIVAN ROAD |
NORTH BILLERICA, MASSACHUSETTS 20007-5118 |
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Correspondence name and address
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JOHN S. PANIAGUAS
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2900 K STREET, NW
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SUITE 200
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WASHINGTON, DC 20007-5118
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