Patent Assignment Details
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| Reel/Frame: | 022335/0576 | |
| Pages: | 3 |
| | Recorded: | 03/03/2009 | | |
| Attorney Dkt #: | 1019952-000241 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12396564
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Filing Dt:
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03/03/2009
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Publication #:
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Pub Dt:
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09/03/2009
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Title:
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SUBSTRATE SURFACE TEMPERATURE MEASUREMENT METHOD, SUBSTRATE PROCESSING APPARATUS USING THE SAME, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignee
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| 2-5-1, KURIGI, ASAO-KU |
| KAWASAKI-SHI |
| KANAGAWA-KEN, TOKYO, JAPAN |
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Correspondence name and address
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BUCHANAN INGERSOLL & ROONEY PC
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P.O. BOX 1404
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ALEXANDRIA, VA 22313-1404
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