Patent Assignment Details
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Reel/Frame: | 022480/0444 | |
| Pages: | 4 |
| | Recorded: | 03/26/2009 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/10/2015
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Application #:
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12332927
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Filing Dt:
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12/11/2008
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Publication #:
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Pub Dt:
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07/09/2009
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Title:
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INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS HAVING INTERNAL LINEAR ANTENNA FOR LARGE AREA PROCESSING
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Assignee
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53, MYUNGRYUNDONG 3GA, JONGRO-GU |
SEOUL 110-745, KOREA, REPUBLIC OF |
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Correspondence name and address
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FOLEY & LARDNER LLP
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WASHINGTON HARBOUR
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3000 K STREET NW. SUITE 500
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WASHINGTON, D.C. 20007-5143
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