Patent Assignment Details
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| Reel/Frame: | 022537/0145 | |
| Pages: | 8 |
| | Recorded: | 04/13/2009 | | |
| Attorney Dkt #: | MAT-28 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12367488
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Filing Dt:
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02/06/2009
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Publication #:
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Pub Dt:
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08/20/2009
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Title:
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Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer Chambers
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Assignee
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| 47131 BAYSIDE PARKWAY |
| FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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JAY R BEYER
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993 GAPTER ROAD
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BOULDER, CO 80303
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