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Patent #:
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Issue Dt:
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01/02/1990
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Application #:
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07271241
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Filing Dt:
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11/14/1988
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Title:
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SKM ION SOURCE
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Patent #:
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Issue Dt:
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04/03/1990
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Application #:
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07293334
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Filing Dt:
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01/04/1989
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Title:
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UNIFORM CROSS SECTION ION BEAM SYSTEM
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Patent #:
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Issue Dt:
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12/04/1990
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Application #:
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07317224
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Filing Dt:
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02/28/1989
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Title:
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ION IMPLANTER END STATION
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Patent #:
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Issue Dt:
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07/24/1990
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Application #:
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07317225
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Filing Dt:
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02/28/1989
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Title:
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BEAM PATTERN CONTROL SYSTEM FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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05/29/1990
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Application #:
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07317226
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Filing Dt:
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02/28/1989
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Title:
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WAFER ROTATION CONTROL FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/29/1991
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Application #:
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07319257
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Filing Dt:
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03/03/1989
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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06/25/1991
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Application #:
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07436296
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Filing Dt:
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11/13/1989
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Title:
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ELLIPTICAL ION BEAM DISTRIBUTION METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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06/11/1991
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Application #:
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07487158
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Filing Dt:
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03/01/1990
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Title:
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ION BEAM CONTROL SYSTEM
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Patent #:
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Issue Dt:
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07/16/1991
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Application #:
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07585914
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Filing Dt:
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09/21/1990
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/12/1992
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Application #:
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07647509
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Filing Dt:
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01/29/1991
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Title:
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ION BEAM POTENTIAL DETECTION PROBE
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Patent #:
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Issue Dt:
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02/25/1992
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Application #:
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07660738
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Filing Dt:
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02/25/1991
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Title:
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REDUCED PATH ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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07/28/1992
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Application #:
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07668955
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Filing Dt:
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03/13/1991
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Title:
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ION BEAM IMPLANTATION METHOD AND APPARATUS FOR PARTICULATE CONTROL
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Patent #:
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Issue Dt:
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10/20/1992
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Application #:
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07705834
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Filing Dt:
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05/28/1991
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Title:
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PROCESS MODULE DISPENSE ARM
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Patent #:
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Issue Dt:
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11/17/1992
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Application #:
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07732778
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Filing Dt:
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07/19/1991
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Title:
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ION BEAM NEUTRALIZATION MEANS GENERATING DIFFUSE SECONDARY EMISSION ELECTRON SHOWER
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Patent #:
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Issue Dt:
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03/30/1993
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Application #:
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07767027
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Filing Dt:
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09/27/1991
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Title:
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ION BEAM PROFILING METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07804484
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Filing Dt:
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12/09/1991
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Title:
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METHOD AND APPARATUS FOR REDUCING TILT ANGLE VARIATIONS IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/08/1993
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Application #:
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07837277
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Filing Dt:
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02/18/1992
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Title:
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BROAD BEAM FLUX DENSITY CONTROL
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Patent #:
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Issue Dt:
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01/05/1993
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Application #:
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07846716
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Filing Dt:
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03/06/1992
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Title:
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ION BEAM IMPLANTER FOR PROVIDING CROSS PLANE FOCUSING
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Patent #:
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Issue Dt:
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07/20/1993
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Application #:
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07847766
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Filing Dt:
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03/05/1992
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Title:
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END STATION FOR A PARALLEL BEAM ION IMPLANTER
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Patent #:
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Issue Dt:
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08/31/1993
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Application #:
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07913731
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Filing Dt:
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07/15/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR MINIMIZING PARTICLE CONTAMINATION
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Patent #:
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Issue Dt:
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05/03/1994
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Application #:
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07995155
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Filing Dt:
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12/22/1992
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Title:
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FLUID FLOW CONTROL METHOD AND APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/25/1995
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Application #:
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08005030
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Filing Dt:
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01/15/1993
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Title:
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WAFER SENSING AND CLAMPING MONITOR
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08029154
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Filing Dt:
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03/10/1993
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Title:
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WAFER RELEASE METHOD AND APPARATUS
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Patent #:
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Issue Dt:
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04/11/1995
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Application #:
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08172441
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Filing Dt:
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12/22/1993
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Title:
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SCAN AND TILT APPARATUS FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/11/1995
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Application #:
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08193436
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Filing Dt:
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02/08/1994
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Title:
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ION BEAM SCAN CONTROL
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Patent #:
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Issue Dt:
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12/13/1994
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Application #:
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08198548
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Filing Dt:
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02/18/1994
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Title:
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ION BEAM CONICAL SCANNING SYSTEM
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Patent #:
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Issue Dt:
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05/30/1995
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Application #:
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08267437
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Filing Dt:
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06/29/1994
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Title:
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STRUCTURE FOR ALIGNMENT OF AN ION SOURCE APERTURE WITH A PREDETERMINED ION BEAM PATH
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Patent #:
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Issue Dt:
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07/02/1996
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Application #:
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08270022
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Filing Dt:
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07/01/1994
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Title:
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ION BEAM ELECTRON NEUTRALIZER
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Patent #:
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Issue Dt:
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06/04/1996
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Application #:
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08312142
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Filing Dt:
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09/26/1994
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Title:
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MICROWAVE ENERGIZED ION SOURCE FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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03/05/1996
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Application #:
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08339554
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Filing Dt:
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11/15/1994
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Title:
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ION GENERATING SOURCE FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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03/04/1997
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Application #:
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08458354
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Filing Dt:
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06/02/1995
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Title:
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ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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06/11/1996
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Application #:
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08465420
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Filing Dt:
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06/05/1995
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Title:
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AN ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08503299
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Filing Dt:
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07/17/1995
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Title:
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IN SITU REMOVAL OF CONTAMINANTS FROM THE INTERIOR SURFACES OF AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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05/27/1997
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Application #:
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08519708
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Filing Dt:
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08/28/1995
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Title:
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METHOD AND APPARATUS FOR IN SITU REMOVAL OF CONTAMINANTS FROM ION BEAM NEUTRALIZATION AND IMPLANTATION APPARATUSES
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Patent #:
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Issue Dt:
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09/10/1996
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Application #:
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08545135
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Filing Dt:
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10/19/1995
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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08/12/1997
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Application #:
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08574242
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Filing Dt:
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12/18/1995
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Title:
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APPARATUS FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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11/25/1997
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Application #:
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08589303
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Filing Dt:
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01/22/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM TRANSPORT
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Patent #:
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Issue Dt:
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08/26/1997
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Application #:
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08655448
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Filing Dt:
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05/30/1996
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Title:
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METHOD AND APPARATUS FOR ION FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08691467
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Filing Dt:
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08/02/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM NEUTRALIZATION
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Patent #:
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Issue Dt:
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04/07/1998
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Application #:
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08696122
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Filing Dt:
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08/13/1996
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Title:
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METHOD AND APPARATUS FOR ION BEAM FORMATION IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/09/1998
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Application #:
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08740478
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Filing Dt:
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10/30/1996
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Title:
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CATHODE MOUNTING FOR ION SOURCE WITH INDIRECTLY HEATED CATHODE
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Patent #:
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Issue Dt:
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04/20/1999
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Application #:
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08753514
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Filing Dt:
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11/26/1996
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Title:
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ION BEAM SHIELD FOR IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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08/11/1998
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Application #:
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08756133
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Filing Dt:
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11/26/1996
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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10/20/1998
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Application #:
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08756656
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Filing Dt:
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11/26/1996
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Title:
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LARGE AREA UNIFORM ION BEAM FORMATION
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08756970
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Filing Dt:
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11/26/1996
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Title:
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PLASMA CHAMBER FOR CONTROLLING ION DOSAGE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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10/27/1998
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Application #:
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08756972
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Filing Dt:
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11/26/1996
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Title:
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SYSTEM AND METHOD FOR COOLING WORKPIECES PROCESSED BY AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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09/22/1998
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Application #:
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08757726
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Filing Dt:
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11/26/1996
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Title:
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CONTROL MECHANISMS FOR DOSIMETRY CONTROL IN ION IMPLANTATION SYSTEMS
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Patent #:
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Issue Dt:
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10/13/1998
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Application #:
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08760714
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Filing Dt:
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12/05/1996
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Title:
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ION SOURCE BLOCK FILAMENT WITH LAYBRINTH CONDUCTIVE PATH
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Patent #:
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Issue Dt:
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09/23/1997
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Application #:
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08762320
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Filing Dt:
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12/09/1996
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Title:
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METHOD FOR CAPTURING AND REMOVING CONTAMINANT PARTICLES FROM AN INTERIOR REGION OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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12/30/1997
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Application #:
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08775145
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Filing Dt:
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12/31/1996
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Title:
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ENDCAP FOR INDIRECTLY HEATED CATHODE OF ION SOURCE
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Patent #:
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Issue Dt:
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05/12/1998
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Application #:
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08779901
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Filing Dt:
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01/07/1997
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Title:
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LOADLOCK ASSEMBLY FOR AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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06/02/1998
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Application #:
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08785013
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Filing Dt:
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01/17/1997
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Title:
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DOSE CONTROL FOR USE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/14/1998
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Application #:
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08841725
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Filing Dt:
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04/29/1997
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Title:
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ACCELERATOR-DECELERATOR ELECTROSTATIC LENS FOR VARIABLY FOCUSING AND MASS RESOLVING AN ION BEAM IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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08862019
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Filing Dt:
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05/22/1997
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Title:
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DUAL-WALLED EXHAUST TUBING FOR VACUUM PUMP
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Patent #:
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Issue Dt:
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10/05/1999
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Application #:
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08891415
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Filing Dt:
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07/10/1997
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Title:
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METHOD OF IMPLANTING LOW DOSES OF IONS INTO A SUBSTRATE
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08891688
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Filing Dt:
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07/11/1997
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Title:
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SYSTEM AND METHOD FOR NEUTRALIZING AN ION BEAM USING WATER VAPOR
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08900379
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Filing Dt:
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07/12/1997
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Title:
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SYSTEM AND METHOD FOR SETECING NEUTRAL PARTICLES IN AN ION BEAN
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Patent #:
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Issue Dt:
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06/01/1999
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Application #:
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08924969
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Filing Dt:
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09/08/1997
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Title:
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ION IMPLANTER ELECTRON SHOWER HAVING ENHANCED SECONDARY ELECTRON EMISSION
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Patent #:
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Issue Dt:
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05/11/1999
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Application #:
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08929180
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Filing Dt:
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09/08/1997
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Title:
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BIASED AND SERRATED EXTENSION TUBE FOR ION IMPLANTER ELECTRON SHOWER
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Patent #:
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Issue Dt:
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01/05/1999
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Application #:
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08931689
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Filing Dt:
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09/16/1997
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Title:
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FILAMENT FOR ION IMPLANTER PLASMA SHOWER
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Patent #:
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Issue Dt:
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01/18/2000
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Application #:
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09014472
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Filing Dt:
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01/28/1998
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Title:
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MAGNETIC FILTER FOR ION SOURCE
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Patent #:
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Issue Dt:
|
05/09/2000
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Application #:
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09031423
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Filing Dt:
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02/26/1998
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Title:
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ION SOURCE HAVING WIDE OUTPUT CURRENT OPERATING RANGE
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09049642
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Filing Dt:
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03/27/1998
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Title:
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METHOD FOR IN-PROCESS CLEANING OF AN ION SOURCE
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Patent #:
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Issue Dt:
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02/15/2000
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Application #:
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09066180
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Filing Dt:
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04/23/1998
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Title:
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ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09081545
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Filing Dt:
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05/19/1998
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Title:
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MULTI-CUSP ION SOURCE
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Patent #:
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Issue Dt:
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12/07/1999
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Application #:
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09095863
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Filing Dt:
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06/11/1998
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Title:
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ION DOSAGE MEASUREMENT APPARATUS FOR AN ION BEAM IMPLANTER AND METHOD
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Patent #:
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Issue Dt:
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09/28/1999
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Application #:
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09099997
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Filing Dt:
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06/19/1998
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Title:
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METHOD AND APPARATUS FOR MONITORING CHARGE NEUTRALIZATION OPERATION
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Patent #:
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Issue Dt:
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03/20/2001
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Application #:
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09130662
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Filing Dt:
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08/07/1998
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Title:
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TOROIDAL FILAMENT FOR PLASMA GENERATION
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Patent #:
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Issue Dt:
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10/24/2000
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Application #:
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09150177
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Filing Dt:
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09/10/1998
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Title:
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TIME OF FLIGHT ENERGY MEASUREMENT APPARATUS FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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04/18/2000
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Application #:
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09162096
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Filing Dt:
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09/28/1998
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Title:
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DOSIMETRY CUP CHARGE COLLECTION IN PLASMA IMMERSION ION IMPLANTATION
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Patent #:
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Issue Dt:
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07/17/2001
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Application #:
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09162181
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Filing Dt:
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09/28/1998
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Title:
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TUNABLE AND MATCHABLE RESONATOR COIL ASSEMBLY FOR ION IMPLANTER LINEAR ACCELERATOR
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Patent #:
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Issue Dt:
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07/03/2001
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Application #:
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09179314
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Filing Dt:
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10/27/1998
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Title:
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RUTHERFORD BACKSCATTERING DETECTION FOR USE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09197083
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Filing Dt:
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11/19/1998
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Title:
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ROTATABLE WORKPIECE SUPPORT INCLUDING CYCLINDRICAL WORKPIECE SUPPORT SURFACES FOR AN ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09199590
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Filing Dt:
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11/25/1998
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Title:
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ION IMPLANTATION DEVICE
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09217383
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Filing Dt:
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12/21/1998
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Title:
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ELASTOMERIC SLIDING SEAL FOR VACUUM BELLOWS
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Patent #:
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Issue Dt:
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05/23/2000
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Application #:
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09217677
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Filing Dt:
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12/21/1998
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Title:
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LATERAL STRESS RELIEF MECHANISM FOR VACUUM BELLOWS
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Patent #:
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Issue Dt:
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08/15/2000
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Application #:
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09218770
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Filing Dt:
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12/22/1998
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Title:
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ION IMPLANTATION CONTROL USING CHARGE COLLECTION, OPTICAL EMISSION SPECTROSCOPY AND MASS ANALYSIS
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09219669
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Filing Dt:
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12/23/1998
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Title:
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ION BEAM IMPLANTATION USING CONICAL MAGNETIC SCANNING
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09219686
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Filing Dt:
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12/23/1998
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Title:
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COMPACT HELICAL RESONATOR COIL FOR ION IMPLANTER LINEAR ACCELERATOR
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Patent #:
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Issue Dt:
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02/27/2001
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Application #:
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09253374
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Filing Dt:
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02/19/1999
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Title:
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METHOD AND SYSTEM FOR OPERATING A VARIABLE APERTURE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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03/27/2001
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Application #:
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09253375
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Filing Dt:
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02/19/1999
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Title:
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CONTINUOUSLY VARIABLE APERTURE FOR HIGH-ENERGY ION IMPLANTER
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Patent #:
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Issue Dt:
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04/24/2001
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Application #:
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09309096
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Filing Dt:
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05/10/1999
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Title:
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SYSTEM AND METHOD FOR CLEANING CONTAMINATED SURFACES IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/10/2001
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Application #:
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09309466
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Filing Dt:
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05/10/1999
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Title:
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SYSTEM AND METHOD FOR CLEANING SILICON-COATED SURFACES IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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08/27/2002
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Application #:
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09316657
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Filing Dt:
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05/21/1999
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Title:
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DECELERATION ELECTRODE CONFIGURATION FOR ULTRA-LOW ENERGY ION IMPLANTER
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Patent #:
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Issue Dt:
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06/05/2001
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Application #:
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09336457
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Filing Dt:
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06/18/1999
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Title:
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METHOD AND SYSTEM FOR OPTIMIZING LINAC OPERATIONAL PARAMETERS
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Patent #:
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Issue Dt:
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02/19/2002
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Application #:
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09466416
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Filing Dt:
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12/17/1999
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Title:
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WAFER PROCESSING CHAMBER HAVING SEPARABLE UPPER AND LOWER HALVES
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Patent #:
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Issue Dt:
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08/06/2002
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Application #:
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09466628
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Filing Dt:
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12/17/1999
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Publication #:
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Pub Dt:
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05/02/2002
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Title:
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SERIAL WAFER HANDLING MECHANISM
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Patent #:
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Issue Dt:
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09/17/2002
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Application #:
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09467700
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Filing Dt:
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12/20/1999
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Title:
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POWER SUPPLY HARDENING FOR ION BEAM SYSTEMS
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Patent #:
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Issue Dt:
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09/18/2001
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Application #:
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09469068
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Filing Dt:
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12/21/1999
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Title:
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GLASS-LIKE INSULATOR FOR ELECTRICALLY ISOLATING ELECTRODES FROM ION IMPLANTER HOUSING
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Patent #:
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Issue Dt:
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11/25/2003
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Application #:
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09583157
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Filing Dt:
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05/30/2000
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Title:
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INTEGRATED RESONATOR AND AMPLIFIER SYSTEM
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Patent #:
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Issue Dt:
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10/23/2001
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Application #:
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09619839
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Filing Dt:
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07/20/2000
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Title:
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Integrated power oscillator RF source for plasma immersion ion implantation system
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09625153
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Filing Dt:
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07/25/2000
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Title:
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METHOD AND SYSTEM FOR MICROWAVE EXCITATION OF PLASMA IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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04/01/2003
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Application #:
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09625718
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Filing Dt:
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07/25/2000
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Title:
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WAVEGUIDE FOR MICROWAVE EXCITATION OF PLASMA IN AN ION BEAM GUIDE
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09633322
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Filing Dt:
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08/07/2000
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Title:
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ION SOURCE HAVING REPLACEABLE AND SPUTTERABLE SOLID SOURCE MATERIAL
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Patent #:
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Issue Dt:
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11/05/2002
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Application #:
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09654379
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Filing Dt:
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09/01/2000
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Title:
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SYSTEM AND METHOD FOR REMOVING CONTAMINANT PARTICLES RELATIVE TO AN ION BEAM
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09654380
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Filing Dt:
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09/01/2000
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Title:
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ELECTROSTATIC TRAP FOR PARTICLES ENTRAINED IN AN ION BEAM
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Patent #:
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Issue Dt:
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02/25/2003
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Application #:
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09654381
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Filing Dt:
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09/01/2000
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Title:
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SYSTEM AND METHOD FOR REMOVING PARTICLES ENTRAINED IN AN ION BEAM
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Patent #:
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Issue Dt:
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02/04/2003
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Application #:
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09654958
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Filing Dt:
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09/05/2000
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Title:
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BULK GAS DELIVERY SYSTEM FOR ION IMPLANTERS
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Patent #:
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Issue Dt:
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06/17/2003
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Application #:
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09670091
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Filing Dt:
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09/26/2000
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Title:
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SYSTEM AND METHOD FOR DELIVERING COOLING GAS FROM ATMOSPHERIC PRESSURE TO A HIGH VACUUM THROUGH A ROTATING SEAL IN A BATCH ION IMPLANTER
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09670241
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Filing Dt:
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09/26/2000
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Title:
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APPARATUS FOR THE BACKSIDE GAS COOLING OF A WAFER IN A BATCH ION IMPLANTATION SYSTEM
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