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Patent #:
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Issue Dt:
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09/09/2008
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Application #:
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11374945
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Filing Dt:
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03/14/2006
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Publication #:
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Pub Dt:
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03/13/2008
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Title:
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ION BEAM MONITORING IN AN ION IMPLANTER USING AN IMAGING DEVICE
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Patent #:
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Issue Dt:
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08/26/2008
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Application #:
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11390039
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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METHOD OF MEASURING ION BEAM POSITION
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Patent #:
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Issue Dt:
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06/03/2008
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Application #:
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11409759
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Filing Dt:
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04/24/2006
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Publication #:
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Pub Dt:
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10/25/2007
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Title:
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LOAD LOCK CONTROL
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Patent #:
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Issue Dt:
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11/09/2010
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Application #:
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11432923
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Filing Dt:
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05/12/2006
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Publication #:
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Pub Dt:
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11/15/2007
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Title:
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COMBINATION LOAD LOCK FOR HANDLING WORKPIECES
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Patent #:
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Issue Dt:
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05/20/2008
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Application #:
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11432977
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Filing Dt:
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05/12/2006
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Publication #:
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Pub Dt:
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11/15/2007
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Title:
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RIBBON BEAM ION IMPLANTER CLUSTER TOOL
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Patent #:
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Issue Dt:
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10/14/2008
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Application #:
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11437547
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Filing Dt:
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05/19/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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ION SOURCE
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Patent #:
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Issue Dt:
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03/24/2009
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Application #:
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11441609
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Filing Dt:
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05/26/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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SYSTEM AND METHOD OF ION BEAM CONTROL IN RESPONSE TO A BEAM GLITCH
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Patent #:
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Issue Dt:
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06/16/2009
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Application #:
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11445667
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Title:
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PARTICULATE PREVENTION IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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08/25/2009
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Application #:
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11445722
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Filing Dt:
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06/02/2006
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Publication #:
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Pub Dt:
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12/21/2006
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Title:
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BEAM STOP AND BEAM TUNING METHODS
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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11503685
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Filing Dt:
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08/14/2006
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Publication #:
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Pub Dt:
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02/14/2008
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Title:
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THROUGHPUT ENHANCEMENT FOR SCANNED BEAM ION IMPLANTERS
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Patent #:
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Issue Dt:
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12/08/2009
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Application #:
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11506998
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Filing Dt:
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08/18/2006
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Publication #:
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Pub Dt:
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03/27/2008
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Title:
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DEPOSITION REDUCTION SYSTEM FOR AN ION IMPLANTER
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Patent #:
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Issue Dt:
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06/05/2007
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Application #:
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11520190
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Filing Dt:
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09/13/2006
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Title:
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SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
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Patent #:
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Issue Dt:
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01/13/2009
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Application #:
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11523144
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Filing Dt:
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09/19/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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BEAM TUNING WITH AUTOMATIC MAGNET POLE ROTATION FOR ION IMPLANTERS
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Patent #:
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Issue Dt:
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11/10/2009
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Application #:
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11523148
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Filing Dt:
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09/19/2006
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Publication #:
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Pub Dt:
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03/20/2008
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Title:
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SYSTEM FOR MAGNETIC SCANNING AND CORRECTION OF AN ION BEAM
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Patent #:
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Issue Dt:
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03/24/2009
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Application #:
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11540064
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Filing Dt:
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09/29/2006
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Publication #:
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Pub Dt:
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04/03/2008
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Title:
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BEAM LINE ARCHITECTURE FOR ION IMPLANTER
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Patent #:
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Issue Dt:
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09/15/2009
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Application #:
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11540449
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Filing Dt:
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09/29/2006
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Publication #:
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Pub Dt:
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04/03/2008
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Title:
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METHODS FOR RAPIDLY SWITCHING OFF AN ION BEAM
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Patent #:
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Issue Dt:
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05/05/2009
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Application #:
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11540897
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Filing Dt:
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09/29/2006
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Publication #:
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Pub Dt:
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04/03/2008
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Title:
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BROAD BEAM ION IMPLANTATION ARCHITECTURE
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Patent #:
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Issue Dt:
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08/12/2014
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Application #:
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11541087
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Filing Dt:
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09/29/2006
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Publication #:
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Pub Dt:
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04/03/2008
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Title:
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METHODS FOR BEAM CURRENT MODULATION BY ION SOURCE PARAMETER MODULATION
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Patent #:
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Issue Dt:
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07/07/2009
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Application #:
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11543346
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Filing Dt:
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10/04/2006
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Publication #:
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Pub Dt:
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12/06/2007
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Title:
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CLOSED LOOP DOSE CONTROL FOR ION IMPLANTATION
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11544971
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Filing Dt:
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10/06/2006
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Publication #:
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Pub Dt:
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03/01/2007
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Title:
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Segmented resonant antenna for radio frequency inductively coupled plasmas
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Patent #:
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Issue Dt:
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03/23/2010
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Application #:
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11548295
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Filing Dt:
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10/11/2006
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Publication #:
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Pub Dt:
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04/17/2008
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Title:
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SENSOR FOR ION IMPLANTER
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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11582814
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Filing Dt:
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10/18/2006
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Publication #:
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Pub Dt:
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05/01/2008
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Title:
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SLIDING WAFER RELEASE GRIPPER / WAFER PEELING GRIPPER
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11633694
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Filing Dt:
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12/04/2006
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Publication #:
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Pub Dt:
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06/05/2008
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Title:
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USE OF ION INDUCED LUMINESCENCE (IIL) AS FEEDBACK CONTROL FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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04/16/2013
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Application #:
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11641334
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Filing Dt:
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12/19/2006
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Publication #:
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Pub Dt:
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06/19/2008
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Title:
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ANNULUS CLAMPING AND BACKSIDE GAS COOLED ELECTROSTATIC CHUCK
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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11644623
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Filing Dt:
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12/22/2006
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Publication #:
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Pub Dt:
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06/26/2008
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Title:
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SYSTEM AND METHOD FOR TWO-DIMENSIONAL BEAM SCAN ACROSS A WORKPIECE OF AN ION IMPLANTER
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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11648979
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Filing Dt:
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01/03/2007
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Publication #:
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Pub Dt:
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07/03/2008
| | | | |
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Title:
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METHOD OF REDUCING PARTICLE CONTAMINATION FOR ION IMPLANTERS
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Patent #:
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Issue Dt:
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09/07/2010
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Application #:
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11687184
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Filing Dt:
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03/16/2007
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Publication #:
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Pub Dt:
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09/18/2008
| | | | |
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Title:
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WORKPIECE GRIPPING DEVICE
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Patent #:
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Issue Dt:
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02/02/2010
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Application #:
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11689769
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Filing Dt:
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03/22/2007
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Publication #:
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Pub Dt:
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09/25/2008
| | | | |
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Title:
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ION SOURCE ARC CHAMBER SEAL
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Patent #:
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Issue Dt:
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06/10/2008
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Application #:
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11703427
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Filing Dt:
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02/07/2007
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Title:
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OFFSET PHASE OPERATION ON A MULTIPHASE AC ELECTROSTATIC CLAMP
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Patent #:
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Issue Dt:
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07/24/2012
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Application #:
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11704033
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Filing Dt:
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02/08/2007
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Publication #:
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Pub Dt:
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08/14/2008
| | | | |
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Title:
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VARIABLE FREQUENCY ELECTROSTATIC CLAMPING
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Patent #:
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Issue Dt:
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07/15/2008
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Application #:
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11716622
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Filing Dt:
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03/09/2007
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Publication #:
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Pub Dt:
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03/13/2008
| | | | |
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Title:
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SYSTEMS AND METHODS FOR BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11739314
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Filing Dt:
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04/24/2007
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Publication #:
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Pub Dt:
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03/20/2008
| | | | |
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Title:
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DOSE UNIFORMITY CORRECTION TECHNIQUE
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11742178
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Filing Dt:
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04/30/2007
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Publication #:
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Pub Dt:
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10/30/2008
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Title:
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METHOD AND SYSTEM FOR ION BEAM PROFILING
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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11752118
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Filing Dt:
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05/22/2007
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Publication #:
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Pub Dt:
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11/27/2008
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Title:
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AIRFLOW MANAGEMENT FOR PARTICLE ABATEMENT IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Patent #:
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Issue Dt:
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04/13/2010
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Application #:
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11757063
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Filing Dt:
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06/01/2007
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Publication #:
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Pub Dt:
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03/20/2008
| | | | |
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Title:
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BEAM ANGLE ADJUSTMENT IN ION IMPLANTERS
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Patent #:
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Issue Dt:
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04/20/2010
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Application #:
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11765499
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Filing Dt:
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06/20/2007
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Publication #:
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Pub Dt:
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10/18/2007
| | | | |
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Title:
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WORK-PIECE PROCESSING SYSTEM
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Patent #:
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Issue Dt:
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06/23/2009
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Application #:
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11784709
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Filing Dt:
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04/09/2007
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Publication #:
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Pub Dt:
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03/20/2008
| | | | |
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Title:
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ION BEAM SCANNING CONTROL METHODS AND SYSTEMS FOR ION IMPLANTATION UNIFORMITY
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Patent #:
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Issue Dt:
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09/08/2009
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Application #:
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11831744
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Filing Dt:
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07/31/2007
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Publication #:
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Pub Dt:
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02/05/2009
| | | | |
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Title:
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ION IMPLANTER HAVING COMBINED HYBRID AND DOUBLE MECHANICAL SCAN ARCHITECTURE
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Patent #:
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Issue Dt:
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07/14/2009
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Application #:
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11840888
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Filing Dt:
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08/17/2007
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Publication #:
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Pub Dt:
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05/08/2008
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Title:
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WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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05/11/2010
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Application #:
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11924166
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Filing Dt:
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10/25/2007
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Publication #:
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Pub Dt:
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05/01/2008
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Title:
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LOW-COST ELECTROSTATIC CLAMP WITH FAST DE-CLAMP TIME
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11932117
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Filing Dt:
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10/31/2007
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Publication #:
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Pub Dt:
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04/30/2009
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Title:
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BROAD RIBBON BEAM ION IMPLANTER ARCHITECTURE WITH HIGH MASS-ENERGY CAPABILITY
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Patent #:
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Issue Dt:
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09/21/2010
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Application #:
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11935738
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Filing Dt:
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11/06/2007
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Publication #:
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Pub Dt:
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05/07/2009
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Title:
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PLASMA ELECTRON FLOOD FOR ION BEAM IMPLANTER
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Patent #:
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Issue Dt:
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06/01/2010
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Application #:
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11947632
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Filing Dt:
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11/29/2007
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Publication #:
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Pub Dt:
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06/04/2009
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Title:
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STRUCTURES AND METHODS FOR MEASURING BEAM ANGLE IN AN ION IMPLANTER
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Patent #:
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Issue Dt:
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04/12/2011
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Application #:
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12022300
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Filing Dt:
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01/30/2008
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Publication #:
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Pub Dt:
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07/30/2009
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Title:
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REMOTE WAFER PRESENCE DETECTION WITH PASSIVE RFID
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Patent #:
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Issue Dt:
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02/15/2011
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Application #:
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12030306
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02/13/2008
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Publication #:
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Pub Dt:
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08/13/2009
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Title:
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METHODS FOR IN SITU SURFACE TREATMENT IN AN ION IMPLANTATION SYSTEM
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Patent #:
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Issue Dt:
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03/29/2011
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Application #:
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12050594
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Filing Dt:
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03/18/2008
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Publication #:
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Pub Dt:
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09/24/2009
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Title:
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EXTRACTION ELECTRODE SYSTEM FOR HIGH CURRENT ION IMPLANTER
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Patent #:
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Issue Dt:
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08/09/2011
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Application #:
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12108890
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Filing Dt:
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04/24/2008
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Publication #:
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Pub Dt:
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10/29/2009
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Title:
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LOW CONTAMINATION, LOW ENERGY BEAMLINE ARCHITECTURE FOR HIGH CURRENT ION IMPLANTATION
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Patent #:
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Issue Dt:
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12/28/2010
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12145713
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06/25/2008
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Publication #:
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Pub Dt:
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12/31/2009
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Title:
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SYSTEM AND METHOD OF CONTROLLING BROAD BEAM UNIFORMITY
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07/12/2011
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Application #:
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12146122
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06/25/2008
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Publication #:
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Pub Dt:
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12/31/2009
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Title:
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SYSTEM AND METHOD FOR REDUCING PARTICLES AND CONTAMINATION BY MATCHING BEAM COMPLEMENTARY APERTURE SHAPES TO BEAM SHAPES
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Patent #:
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Issue Dt:
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03/01/2011
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Application #:
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12176748
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Filing Dt:
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07/21/2008
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Publication #:
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Pub Dt:
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01/21/2010
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Title:
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METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION
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Patent #:
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Issue Dt:
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07/24/2012
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Application #:
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12178014
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Filing Dt:
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07/23/2008
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Publication #:
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Pub Dt:
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02/12/2009
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Title:
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WORKPIECE GRIPPING INTEGRITY SENSOR
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Patent #:
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Issue Dt:
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07/06/2010
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Application #:
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12183787
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Filing Dt:
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07/31/2008
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Publication #:
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Pub Dt:
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02/05/2009
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Title:
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ELEVATED TEMPERATURE RF ION SOURCE
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12212507
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Filing Dt:
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09/17/2008
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Publication #:
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Pub Dt:
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03/18/2010
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Title:
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ADJUSTABLE DEFLECTION OPTICS FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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11/30/2010
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Application #:
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12238265
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Filing Dt:
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09/25/2008
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Publication #:
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Pub Dt:
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03/25/2010
| | | | |
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Title:
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EXTRACTION ELECTRODE MANIPULATOR
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Patent #:
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Issue Dt:
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09/13/2016
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Application #:
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12245866
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Filing Dt:
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10/06/2008
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Publication #:
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Pub Dt:
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04/08/2010
| | | | |
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Title:
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HYBRID SCANNING FOR ION IMPLANTATION
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Patent #:
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Issue Dt:
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05/31/2011
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Application #:
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12262399
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Filing Dt:
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10/31/2008
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Publication #:
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Pub Dt:
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05/06/2010
| | | | |
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Title:
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WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS
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|
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Patent #:
|
|
Issue Dt:
|
12/02/2014
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Application #:
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12262990
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Filing Dt:
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10/31/2008
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Publication #:
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Pub Dt:
|
05/06/2010
| | | | |
|
Title:
|
ELECTROSTATIC CHUCK GROUND PUNCH
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|
|
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Patent #:
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|
Issue Dt:
|
09/18/2012
|
Application #:
|
12331619
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Filing Dt:
|
12/10/2008
|
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Publication #:
|
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Pub Dt:
|
06/10/2010
| | | | |
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Title:
|
DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK
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|
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Patent #:
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Issue Dt:
|
09/20/2011
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Application #:
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12331813
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Filing Dt:
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12/10/2008
|
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Publication #:
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Pub Dt:
|
06/10/2010
| | | | |
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Title:
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ELECTROSTATIC CHUCK WITH COMPLIANT COAT
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Patent #:
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Issue Dt:
|
08/30/2011
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Application #:
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12338644
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Filing Dt:
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12/18/2008
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Publication #:
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Pub Dt:
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06/24/2010
| | | | |
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Title:
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ION IMPLANTATION WITH DIMINISHED SCANNING FIELD EFFECTS
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Patent #:
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Issue Dt:
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04/04/2017
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Application #:
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12340936
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Filing Dt:
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12/22/2008
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Publication #:
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Pub Dt:
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06/24/2010
| | | | |
|
Title:
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ELECTROSTATIC CHUCK SHIELDING MECHANISM
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Patent #:
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Issue Dt:
|
05/01/2012
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Application #:
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12357688
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Filing Dt:
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01/22/2009
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Publication #:
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Pub Dt:
|
07/22/2010
| | | | |
|
Title:
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ION BEAM ANGLE CALIBRATION AND EMITTANCE MEASUREMENT SYSTEM FOR RIBBON BEAMS
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|
|
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Patent #:
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Issue Dt:
|
08/07/2012
|
Application #:
|
12357973
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Filing Dt:
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01/22/2009
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|
Publication #:
|
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Pub Dt:
|
07/22/2010
| | | | |
|
Title:
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ENHANCED LOW ENERGY ION BEAM TRANSPORT IN ION IMPLANTATION
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Patent #:
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Issue Dt:
|
08/14/2012
|
Application #:
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12358788
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Filing Dt:
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01/23/2009
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Publication #:
|
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Pub Dt:
|
07/29/2010
| | | | |
|
Title:
|
NON-CONDENSING THERMOS CHUCK
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