Patent Assignment Details
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Reel/Frame: | 022573/0061 | |
| Pages: | 2 |
| | Recorded: | 04/21/2009 | | |
Attorney Dkt #: | 520.47321X00 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/16/2010
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Application #:
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11687002
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Filing Dt:
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03/16/2007
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Publication #:
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Pub Dt:
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09/27/2007
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Title:
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METROLOGY SYSTEM OF FINE PATTERN FOR PROCESS CONTROL BY CHARGED PARTICLE BEAM
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Assignee
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1-24-14, NISHI SHINBASHI, MINATO-KU |
TOKYO, JAPAN |
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Correspondence name and address
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ANTONELLI, TERRY, STOUT & KRAUS, LLP
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1300 N. 17TH ST.
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SUITE 1800
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ARLINGTON, VA 22209
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