Patent Assignment Details
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Reel/Frame: | 022667/0359 | |
| Pages: | 12 |
| | Recorded: | 05/11/2009 | | |
Attorney Dkt #: | 013230/ETCH/CHMBR/MDD |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12395465
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Filing Dt:
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02/27/2009
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Publication #:
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Pub Dt:
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09/03/2009
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Title:
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ETCH RATE AND CRITICAL DIMENSION UNIFORMITY BY SELECTION OF FOCUS RING MATERIAL
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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PAULINE S. FISCHER
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APPLIED MATERIALS, INC.
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P.O. BOX 450 A
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SANTA CLARA, CA 95052
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