Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 022846/0068 | |
| Pages: | 4 |
| | Recorded: | 06/18/2009 | | |
| Attorney Dkt #: | 021773-000530US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/06/2009
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Application #:
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11452544
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Filing Dt:
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06/13/2006
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Publication #:
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Pub Dt:
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10/19/2006
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Title:
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METHOD FOR IN-LINE MONITORING OF VIA/CONTACT HOLES ETCH PROCESS BASED ON TEST STRUCTURES IN SEMICONDUCTOR WAFER MANUFACTURING
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Assignee
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| 1595 MCCANDLESS DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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TOWNSEND AND TOWNSEND AND CREW LLP
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TWO EMBARCADERO CENTER, 8TH FLOOR
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SAN FRANCISCO, CA 94111
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