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Reel/Frame:	022846/0663			Pages:	21
		Recorded:	06/19/2009
Attorney Dkt #:	11000054-0001
Conveyance:	RELEASE OF SECURITY INTEREST

Total properties: 81

1

Patent #:	5118078	Issue Dt:	06/02/1992	Application #:	07701200	Filing Dt:	05/16/1991
Title:	BUTTERFLY VALVE HAVING IMPROVED SEALING CHARACTERISTICS

2

Patent #:	5218991	Issue Dt:	06/15/1993	Application #:	07872350	Filing Dt:	04/23/1992
Title:	REGULATOR FLOW CONTROL

3

Patent #:	5191793	Issue Dt:	03/09/1993	Application #:	07912007	Filing Dt:	07/10/1992
Title:	FLUID MASS FLOW METER DEVICE WITH REDUCED ATTITUDE SENSITIVITY

4

Patent #:	5413139	Issue Dt:	05/09/1995	Application #:	08078365	Filing Dt:	06/16/1993
Title:	THROTTLE VALVE

5

Patent #:	5396803	Issue Dt:	03/14/1995	Application #:	08088317	Filing Dt:	07/07/1993
Title:	DUAL BALANCED CAPACITANCE MANOMETERS FOR SUPPRESSING VIBRATION EFFECTS

6

Patent #:	5660207	Issue Dt:	08/26/1997	Application #:	08365861	Filing Dt:	12/29/1994
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

7

Patent #:	5803507	Issue Dt:	09/08/1998	Application #:	08557378	Filing Dt:	11/13/1995
Title:	APPARATUS FOR HANDLING PROCESS FLUID

8

Patent #:	5785297	Issue Dt:	07/28/1998	Application #:	08682170	Filing Dt:	07/16/1996
Title:	VALVE MECHANISM

9

Patent #:	5850850	Issue Dt:	12/22/1998	Application #:	08685260	Filing Dt:	07/23/1996
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

10

Patent #:	5765283	Issue Dt:	06/16/1998	Application #:	08685322	Filing Dt:	07/23/1996
Title:	METHOD OF MAKING A FLOW CONTROLLER

11

Patent #:	5763774	Issue Dt:	06/09/1998	Application #:	08691061	Filing Dt:	08/01/1996
Title:	FLUID FLOW METER WITH REDUCED ORIENTATION SENSITIVITY

12

Patent #:	5839355	Issue Dt:	11/24/1998	Application #:	08740960	Filing Dt:	11/05/1996
Title:	FRYER WITH COOKING MEDIUM LOSS PROTECTION AND ASSOCIATED METHODS OF PROTECTING FRYERS

13

Patent #:	5730181	Issue Dt:	03/24/1998	Application #:	08758971	Filing Dt:	12/02/1996
Title:	MASS FLOW CONTROLLER WITH VERTICAL PURIFIER

14

Patent #:	6044701	Issue Dt:	04/04/2000	Application #:	08815323	Filing Dt:	03/10/1997
Title:	THERMAL MASS FLOW CONTROLLER HAVING ORTHOGONAL THERMAL MASS FLOW SENSOR

15

Patent #:	5901741	Issue Dt:	05/11/1999	Application #:	08860343	Filing Dt:	10/02/1997
Title:	FLOW CONTROLLER, PARTS OF FLOW CONTROLLER, AND RELATED METHOD

16

Patent #:	6078030	Issue Dt:	06/20/2000	Application #:	09150458	Filing Dt:	09/09/1998
Title:	COMPONENT HEATER FOR USE IN SEMICONDUCTOR MANUFACTURING EQUIPMENT

17

Patent #:	6319743	Issue Dt:	11/20/2001	Application #:	09291468	Filing Dt:	04/14/1999
Title:	METHOD OF MAKING THIN FILM PIEZORESISTIVE SENSOR

18

Patent #:	6343617	Issue Dt:	02/05/2002	Application #:	09350744	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

19

Patent #:	6575027	Issue Dt:	06/10/2003	Application #:	09350746	Filing Dt:	07/09/1999
Title:	MASS FLOW SENSOR INTERFACE CIRCUIT

20

Patent #:	6449571	Issue Dt:	09/10/2002	Application #:	09350747	Filing Dt:	07/09/1999
Title:	SYSTEM AND METHOD FOR SENSOR RESPONSE LINEARIZATION

21

Patent #:	6445980	Issue Dt:	09/03/2002	Application #:	09351098	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A VARIABLE GAIN PROPORTIONAL-INTEGRAL (PI) CONTROLLER

22

Patent #:	6404612	Issue Dt:	06/11/2002	Application #:	09351111	Filing Dt:	07/10/1999
Title:	METHOD AND SYSTEM FOR DRIVING A SOLENOID

23

Patent #:	6389364	Issue Dt:	05/14/2002	Application #:	09351120	Filing Dt:	07/10/1999
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

24

Patent #:	6425281	Issue Dt:	07/30/2002	Application #:	09616819	Filing Dt:	07/12/2000
Title:	PRESSURE INSENSITIVE GAS CONTROL SYSTEM

25

Patent #:	6539792	Issue Dt:	04/01/2003	Application #:	09783439	Filing Dt:	02/14/2001
Publication #:	US20010052261	Pub Dt:	12/20/2001
Title:	METHOD AND APPARATUS FOR BALANCING RESISTANCE

26

Patent #:	7004453	Issue Dt:	02/28/2006	Application #:	09952083	Filing Dt:	09/12/2001
Title:	PENDULUM VALVE WITH A FULL RANGE OF POSITION CONTROL

27

Patent #:	6681787	Issue Dt:	01/27/2004	Application #:	10006774	Filing Dt:	12/06/2001
Publication #:	US20020139418	Pub Dt:	10/03/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

28

Patent #:	6714878	Issue Dt:	03/30/2004	Application #:	10062080	Filing Dt:	01/31/2002
Publication #:	US20020114732	Pub Dt:	08/22/2002
Title:	SYSTEM AND METHOD FOR A DIGITAL MASS FLOW CONTROLLER

29

Patent #:	6910381	Issue Dt:	06/28/2005	Application #:	10063991	Filing Dt:	05/31/2002
Publication #:	US20030221491	Pub Dt:	12/04/2003
Title:	SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE

30

Patent #:	6734659	Issue Dt:	05/11/2004	Application #:	10064136	Filing Dt:	06/13/2002
Title:	ELECTRONIC INTERFACE FOR USE WITH DUAL ELECTRODE CAPACITANCE DIAPHRAGM GAUGES

31

Patent #:	6701790	Issue Dt:	03/09/2004	Application #:	10064137	Filing Dt:	06/13/2002
Publication #:	US20030231697	Pub Dt:	12/18/2003
Title:	TEMPERATURE REGULATOR FOR USE WITH A PRESSURE SENSING DEVICE

32

Patent #:	6640822	Issue Dt:	11/04/2003	Application #:	10068052	Filing Dt:	02/05/2002
Publication #:	US20020117202	Pub Dt:	08/29/2002
Title:	SYSTEM AND METHOD OF OPERATION OF A DIGITAL MASS FLOW CONTROLLER

33

Patent #:	6962164	Issue Dt:	11/08/2005	Application #:	10131603	Filing Dt:	04/24/2002
Publication #:	US20020198668	Pub Dt:	12/26/2002
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

34

Patent #:	6865520	Issue Dt:	03/08/2005	Application #:	10133110	Filing Dt:	04/26/2002
Publication #:	US20020161559	Pub Dt:	10/31/2002
Title:	SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS

35

Patent #:	6752166	Issue Dt:	06/22/2004	Application #:	10154433	Filing Dt:	05/23/2002
Publication #:	US20020179148	Pub Dt:	12/05/2002
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

36

Patent #:	7000482	Issue Dt:	02/21/2006	Application #:	10178170	Filing Dt:	06/24/2002
Publication #:	US20030233882	Pub Dt:	12/25/2003
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

37

Patent #:	6837111	Issue Dt:	01/04/2005	Application #:	10228612	Filing Dt:	08/27/2002
Publication #:	US20030233883	Pub Dt:	12/25/2003
Title:	VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR

38

Patent #:	7043374	Issue Dt:	05/09/2006	Application #:	10400149	Filing Dt:	03/26/2003
Publication #:	US20040204885	Pub Dt:	10/14/2004
Title:	FLOW SENSOR SIGNAL CONVERSION

39

Patent #:	7243035	Issue Dt:	07/10/2007	Application #:	10444249	Filing Dt:	05/23/2003
Publication #:	US20040030522	Pub Dt:	02/12/2004
Title:	SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION

40

Patent #:	6964187	Issue Dt:	11/15/2005	Application #:	10468413	Filing Dt:	08/19/2003
Publication #:	US20040079136	Pub Dt:	04/29/2004
Title:	VACUUM SENSOR

41

Patent #:	7124647	Issue Dt:	10/24/2006	Application #:	10515328	Filing Dt:	11/22/2004
Publication #:	US20050241412	Pub Dt:	11/03/2005
Title:	SLOTTED FLOW RESTRICTOR FOR A MASS FLOW METER

42

Patent #:	6845659	Issue Dt:	01/25/2005	Application #:	10622004	Filing Dt:	07/16/2003
Publication #:	US20040100289	Pub Dt:	05/27/2004
Title:	VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG

43

Patent #:	7073392	Issue Dt:	07/11/2006	Application #:	10622080	Filing Dt:	07/17/2003
Publication #:	US20040074311	Pub Dt:	04/22/2004
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

44

Patent #:	6826953	Issue Dt:	12/07/2004	Application #:	10623147	Filing Dt:	07/18/2003
Publication #:	US20040123672	Pub Dt:	07/01/2004
Title:	FLOW SENSOR

45

Patent #:	7131334	Issue Dt:	11/07/2006	Application #:	10827026	Filing Dt:	04/19/2004
Publication #:	US20050230768	Pub Dt:	10/20/2005
Title:	PRESSURE SENSOR DEVICE AND METHOD

46

Patent #:	6941965	Issue Dt:	09/13/2005	Application #:	10832949	Filing Dt:	04/27/2004
Publication #:	US20040200529	Pub Dt:	10/14/2004
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

47

Patent #:	7010983	Issue Dt:	03/14/2006	Application #:	10848739	Filing Dt:	05/19/2004
Publication #:	US20050011271	Pub Dt:	01/20/2005
Title:	METHOD FOR DIGITALLY CONTROLLING A SENSOR SYSTEM

48

Patent #:	7117104	Issue Dt:	10/03/2006	Application #:	10878974	Filing Dt:	06/28/2004
Publication #:	US20050288873	Pub Dt:	12/29/2005
Title:	ULTRASONIC LIQUID FLOW CONTROLLER

49

Patent #:	7216019	Issue Dt:	05/08/2007	Application #:	10886836	Filing Dt:	07/08/2004
Publication #:	US20050288825	Pub Dt:	12/29/2005
Title:	METHOD AND SYSTEM FOR A MASS FLOW CONTROLLER WITH REDUCED PRESSURE SENSITIVITY

50

Patent #:	7133785	Issue Dt:	11/07/2006	Application #:	10887040	Filing Dt:	07/08/2004
Publication #:	US20060009925	Pub Dt:	01/12/2006
Title:	VALVE CONTROL SYSTEM AND METHOD

51

Patent #:	7222029	Issue Dt:	05/22/2007	Application #:	10887048	Filing Dt:	07/08/2004
Publication #:	US20060009926	Pub Dt:	01/12/2006
Title:	ATTITUDE INSENSITIVE FLOW DEVICE SYSTEM AND METHOD

52

Patent #:	7412986	Issue Dt:	08/19/2008	Application #:	10887591	Filing Dt:	07/09/2004
Publication #:	US20060005882	Pub Dt:	01/12/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

53

Patent #:	7113895	Issue Dt:	09/26/2006	Application #:	10926860	Filing Dt:	08/26/2004
Publication #:	US20050023197	Pub Dt:	02/03/2005
Title:	SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS

54

Patent #:	7424895	Issue Dt:	09/16/2008	Application #:	10946031	Filing Dt:	09/21/2004
Publication #:	US20060011237	Pub Dt:	01/19/2006
Title:	METHOD AND SYSTEM FOR FLOW MEASUREMENT AND VALIDATION OF A MASS FLOW CONTROLLER

55

Patent #:	7043994	Issue Dt:	05/16/2006	Application #:	10952508	Filing Dt:	09/28/2004
Publication #:	US20050039535	Pub Dt:	02/24/2005
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

56

Patent #:	7082824	Issue Dt:	08/01/2006	Application #:	10978156	Filing Dt:	10/29/2004
Publication #:	US20050092077	Pub Dt:	05/05/2005
Title:	VARIABLE RESISTANCE SENSOR WITH COMMON REFERENCE LEG

57

Patent #:	7073388	Issue Dt:	07/11/2006	Application #:	10996023	Filing Dt:	11/23/2004
Publication #:	US20050088270	Pub Dt:	04/28/2005
Title:	VARIABLE CAPACITANCE MEASURING DEVICE COMPRISING A GLASS-CERAMIC INSULATOR

58

Patent #:	7150201	Issue Dt:	12/19/2006	Application #:	11012750	Filing Dt:	12/15/2004
Publication #:	US20060123920	Pub Dt:	06/15/2006
Title:	SYSTEM AND METHOD FOR MEASURING FLOW

59

Patent #:	7272512	Issue Dt:	09/18/2007	Application #:	11051209	Filing Dt:	02/04/2005
Publication #:	US20050126306	Pub Dt:	06/16/2005
Title:	FLOW SENSOR SIGNAL CONVERSION

60

Patent #:	7231931	Issue Dt:	06/19/2007	Application #:	11091824	Filing Dt:	03/28/2005
Publication #:	US20050166968	Pub Dt:	08/04/2005
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

61

Patent #:	7114511	Issue Dt:	10/03/2006	Application #:	11092144	Filing Dt:	03/29/2005
Publication #:	US20050167627	Pub Dt:	08/04/2005
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

62

Patent #:	7363182	Issue Dt:	04/22/2008	Application #:	11129166	Filing Dt:	05/13/2005
Publication #:	US20050205774	Pub Dt:	09/22/2005
Title:	SYSTEM AND METHOD FOR MASS FLOW DETECTION DEVICE CALIBRATION

63

Patent #:	7273063	Issue Dt:	09/25/2007	Application #:	11148053	Filing Dt:	06/08/2005
Publication #:	US20050223813	Pub Dt:	10/13/2005
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

64

Patent #:	7143774	Issue Dt:	12/05/2006	Application #:	11174753	Filing Dt:	07/05/2005
Publication #:	US20050241698	Pub Dt:	11/03/2005
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

65

Patent #:	7720628	Issue Dt:	05/18/2010	Application #:	11321238	Filing Dt:	12/29/2005
Publication #:	US20060107746	Pub Dt:	05/25/2006
Title:	DIGITALLY CONTROLLED SENSOR SYSTEM

66

Patent #:	7287434	Issue Dt:	10/30/2007	Application #:	11341826	Filing Dt:	01/27/2006
Publication #:	US20060123921	Pub Dt:	06/15/2006
Title:	SYSTEM AND METHOD FOR MEASURING FLOW

67

Patent #:	7680399	Issue Dt:	03/16/2010	Application #:	11349068	Filing Dt:	02/07/2006
Publication #:	US20070181703	Pub Dt:	08/09/2007
Title:	SYSTEM AND METHOD FOR PRODUCING AND DELIVERING VAPOR

68

Patent #:	7490518	Issue Dt:	02/17/2009	Application #:	11369885	Filing Dt:	03/07/2006
Publication #:	US20060219018	Pub Dt:	10/05/2006
Title:	SYSTEM AND METHOD OF OPERATION OF AN EMBEDDED SYSTEM FOR A DIGITAL CAPACITANCE DIAPHRAGM GAUGE

69

Patent #:	7409871	Issue Dt:	08/12/2008	Application #:	11377911	Filing Dt:	03/16/2006
Publication #:	US20070219650	Pub Dt:	09/20/2007
Title:	MASS FLOW METER OR CONTROLLER WITH INCLINATION SENSOR

70

Patent #:	7395716	Issue Dt:	07/08/2008	Application #:	11392253	Filing Dt:	03/29/2006
Publication #:	US20060236775	Pub Dt:	10/26/2006
Title:	VARIABLE CAPACITANCE MEASURING DEVICE

71

Patent #:	7360448	Issue Dt:	04/22/2008	Application #:	11502308	Filing Dt:	08/10/2006
Publication #:	US20070034016	Pub Dt:	02/15/2007
Title:	ULTRASONIC FLOW SENSOR HAVING REFLECTING INTERFACE

72

Patent #:	NONE	Issue Dt:		Application #:	11503873	Filing Dt:	08/11/2006
Publication #:	US20070191990	Pub Dt:	08/16/2007
Title:	FLOW MEASUREMENT AND CONTROL WITH BUBBLE DETECTION

73

Patent #:	7424894	Issue Dt:	09/16/2008	Application #:	11504175	Filing Dt:	08/15/2006
Publication #:	US20060272703	Pub Dt:	12/07/2006
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

74

Patent #:	7360551	Issue Dt:	04/22/2008	Application #:	11651231	Filing Dt:	01/09/2007
Publication #:	US20070107783	Pub Dt:	05/17/2007
Title:	METHOD AND APPARATUS FOR PROVIDING A DETERMINED RATIO OF PROCESS FLUIDS

75

Patent #:	NONE	Issue Dt:		Application #:	11664550	Filing Dt:	04/03/2007
Publication #:	US20080097657	Pub Dt:	04/24/2008
Title:	Method and System for Wafer Temperature Control

76

Patent #:	7380564	Issue Dt:	06/03/2008	Application #:	11749386	Filing Dt:	05/16/2007
Publication #:	US20070215206	Pub Dt:	09/20/2007
Title:	SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER

77

Patent #:	7412336	Issue Dt:	08/12/2008	Application #:	11788201	Filing Dt:	04/19/2007
Publication #:	US20070260412	Pub Dt:	11/08/2007
Title:	ATTITUDE INSENSITIVE FLOW DEVICE SYSTEM AND METHOD

78

Patent #:	7434477	Issue Dt:	10/14/2008	Application #:	11843418	Filing Dt:	08/22/2007
Publication #:	US20070288180	Pub Dt:	12/13/2007
Title:	METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER

79

Patent #:	7636640	Issue Dt:	12/22/2009	Application #:	11850505	Filing Dt:	09/05/2007
Publication #:	US20080059084	Pub Dt:	03/06/2008
Title:	MULTI-GAS FLOW DEVICE

80

Patent #:	7720617	Issue Dt:	05/18/2010	Application #:	11856585	Filing Dt:	09/17/2007
Publication #:	US20080000283	Pub Dt:	01/03/2008
Title:	FLOW SENSOR SIGNAL CONVERSION

81

Patent #:	D390138	Issue Dt:	02/03/1998	Application #:	29057079	Filing Dt:	07/16/1996
Title:	INVENTORY CONTROL PROBE

Assignors

1

THE BANK OF NEW YORK MELLON

Exec Dt:

06/12/2009

2

TPG PARTNERS III, L.P.

Exec Dt:

06/12/2009

3

TPG INVESTORS III, L.P.

Exec Dt:

06/12/2009

4

TPG DUTCH PARALELL III, C.V.

Exec Dt:

06/12/2009

5

FOF PARTNERS III, L.P.

Exec Dt:

06/12/2009

6

FOF PARTNERS III-B, L.P.

Exec Dt:

06/12/2009

7

T3 GENPAR II, L.P.

Exec Dt:

06/12/2009

8

T3 PARALLEL II, L.P.

Exec Dt:

06/12/2009

9

TPG PARTNERS IV, L.P.

Exec Dt:

06/12/2009

10

SPECIAL VALUE ABSOLUTE RETURN FUND, LLC

Exec Dt:

06/12/2009

11

SPECIAL VALUE CONTINUATION PARTNERS, LP

Exec Dt:

06/12/2009

Assignees

1

2645 ZANKER ROAD

SUITE 101

SAN JOSE, CALIFORNIA 95134

2

CELERITY HOLDING COMPANY, INC.

2645 ZANKER ROAD

SUITE 101

SAN JOSE, CALIFORNIA 95134

3

CELERITY SYSTEMS, INC.

2645 ZANKER ROAD

SUITE 101

SAN JOSE, CALIFORNIA 95134

Correspondence name and address
	DARREN W. COLLINS, SONNENSCHEIN
	P.O. BOX 061080, WACKER DRIVE STATION
	SEARS TOWER
	CHICAGO, IL 60606

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