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Reel/Frame:022888/0514   Pages: 5
Recorded: 06/29/2009
Attorney Dkt #:061282-0226
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
07/20/2010
Application #:
10569464
Filing Dt:
03/03/2006
Publication #:
Pub Dt:
11/23/2006
Title:
METHOD FOR FORMING IMPURITY-INTRODUCED LAYER, METHOD FOR CLEANING OBJECT TO BE PROCESSED APPARATUS FOR INTRODUCING IMPURITY AND METHOD FOR PRODUCING DEVICE
Assignors
1
Exec Dt:
02/20/2006
2
Exec Dt:
02/17/2006
3
Exec Dt:
02/16/2006
4
Exec Dt:
02/20/2006
5
Exec Dt:
02/17/2006
6
Exec Dt:
02/17/2006
7
Exec Dt:
02/17/2006
8
Exec Dt:
02/17/2006
9
Exec Dt:
02/22/2006
Assignee
1
1006, OAZA KADOMA, KADOMA-SHI,
OSAKA, JAPAN 571-8501
Correspondence name and address
MCDERMOTT WILL & EMERY LLP
600 THIRTEENTH STREET, N.W.
WASHINGTON, DC 20005

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