Patent Assignment Details
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Reel/Frame: | 022896/0122 | |
| Pages: | 4 |
| | Recorded: | 06/29/2009 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12227387
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Filing Dt:
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06/26/2009
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Publication #:
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Pub Dt:
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12/10/2009
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Title:
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Structure Model description and use for scatterometry-based semiconductor manufacturing process metrology
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Assignee
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ONE RUDOLPH ROAD |
FLANDERS, NEW JERSEY 07836 |
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Correspondence name and address
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HARRY SMITH
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HARRINGTON & SMITH, PC
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4 RESEARCH DRIVE
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SHELTON, CT 06484-6212
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