USPTO Assignments on the Web

	United States Patent and Trademark Office
	Home\|Site Index\|Search\|Guides\|Contacts\|eBusiness\|eBiz alerts\|News\|Help

Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	023044/0414			Pages:	5
		Recorded:	08/04/2009
Attorney Dkt #:	37291.00001
Conveyance:	CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).

Total properties: 15

Patent #:	6375790	Issue Dt:	04/23/2002	Application #:	09412949	Filing Dt:	10/05/1999
Title:	ADAPTIVE GCIB FOR SMOOTHING SURFACES

Patent #:	6595506	Issue Dt:	07/22/2003	Application #:	09715506	Filing Dt:	11/17/2000
Title:	APPARATUS AND METHOD FOR REDUCED PARTICULATE GENERATION DURING WORKPIECE HANDLING

Patent #:	6660340	Issue Dt:	12/09/2003	Application #:	09717182	Filing Dt:	11/21/2000
Title:	DIAMOND-LIKE CARBON FILM WITH ENHANCED ADHESION

Patent #:	6635883	Issue Dt:	10/21/2003	Application #:	09727810	Filing Dt:	12/01/2000
Publication #:	US20010033128	Pub Dt:	10/25/2001
Title:	GAS CLUSTER ION BEAM LOW MASS ION FILTER

Patent #:	6613240	Issue Dt:	09/02/2003	Application #:	09727881	Filing Dt:	12/01/2000
Publication #:	US20020068132	Pub Dt:	06/06/2002
Title:	METHOD AND APPARATUS FOR SMOOTHING THIN CONDUCTIVE FILMS BY GAS CLUSTER ION BEAM

Patent #:	6629508	Issue Dt:	10/07/2003	Application #:	09733211	Filing Dt:	12/08/2000
Publication #:	US20020162508	Pub Dt:	11/07/2002
Title:	IONIZER FOR GAS CLUSTER ION BEAM FORMATION

Patent #:	6737643	Issue Dt:	05/18/2004	Application #:	09811904	Filing Dt:	03/19/2001
Publication #:	US20010054686	Pub Dt:	12/27/2001
Title:	DETECTOR AND METHOD FOR CLUSTER ION BEAM DIAGNOSTICS

Patent #:	6750460	Issue Dt:	06/15/2004	Application #:	09842540	Filing Dt:	04/26/2001
Publication #:	US20020005676	Pub Dt:	01/17/2002
Title:	SYSTEM AND METHOD FOR ADJUSTING THE PROPERTIES OF A DEVICE BY GCIB PROCESSING

Patent #:	6831272	Issue Dt:	12/14/2004	Application #:	09904919	Filing Dt:	07/13/2001
Publication #:	US20020070361	Pub Dt:	06/13/2002
Title:	GAS CLUSTER ION BEAM SIZE DIAGNOSTICS AND WORKPIECE PROCESSING

Patent #:	6770874	Issue Dt:	08/03/2004	Application #:	09905536	Filing Dt:	07/13/2001
Publication #:	US20020036261	Pub Dt:	03/28/2002
Title:	GAS CLUSTER ION BEAM SIZE DIAGNOSTICS AND WORKPIECE PROCESSING

Patent #:	6624081	Issue Dt:	09/23/2003	Application #:	09969559	Filing Dt:	10/02/2001
Publication #:	US20020016079	Pub Dt:	02/07/2002
Title:	ENHANCED ETCHING/SMOOTHING OF DIELECTRIC SURFACES

Patent #:	6805807	Issue Dt:	10/19/2004	Application #:	09999099	Filing Dt:	10/31/2001
Publication #:	US20020139772	Pub Dt:	10/03/2002
Title:	ADAPTIVE GCIB FOR SMOOTHING SURFACES

Patent #:	6646277	Issue Dt:	11/11/2003	Application #:	10036179	Filing Dt:	12/26/2001
Publication #:	US20020130275	Pub Dt:	09/19/2002
Title:	CHARGING CONTROL AND DOSIMETRY SYSTEM FOR GAS CLUSTER ION BEAM

Patent #:	6812147	Issue Dt:	11/02/2004	Application #:	10269605	Filing Dt:	10/11/2002
Publication #:	US20030073314	Pub Dt:	04/17/2003
Title:	GCIB PROCESSING TO IMPROVE INTERCONNECTION VIAS AND IMPROVED INTERCONNECTION VIA

Patent #:	7377228	Issue Dt:	05/27/2008	Application #:	10667006	Filing Dt:	09/19/2003
Publication #:	US20040113093	Pub Dt:	06/17/2004
Title:	SYSTEM FOR AND METHOD OF GAS CLUSTER ION BEAM PROCESSING

Assignor

Exec Dt:

03/30/2004

Assignee

37 MANNING ROAD

BILLERICA, MASSACHUSETTS 01821

Correspondence name and address
	DAVID W. GOMES
	125 SUMMER STREET
	BURNS & LEVINSON LLP
	BOSTON, MA 02110

Search Results as of: 05/13/2024 08:37 PM

If you have any comments or questions concerning the data displayed, contact PRD / Assignments at 571-272-3350. v.2.6

Web interface last modified: August 25, 2017 v.2.6