|
Total properties:
62
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|
|
Patent #:
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|
Issue Dt:
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05/07/1996
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Application #:
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08194325
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Filing Dt:
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02/08/1994
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Title:
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SUPPORT FOR DISK-SHAPED ARTICLES
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|
Patent #:
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|
Issue Dt:
|
04/09/1996
|
Application #:
|
08276202
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Filing Dt:
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07/18/1994
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Title:
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METHOD AND APPARATUS FOR CLEANING INTEGRATED CIRCUIT WAFERS
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Patent #:
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|
Issue Dt:
|
08/05/1997
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Application #:
|
08484921
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Filing Dt:
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06/07/1995
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|
Title:
|
METHOD AND APPARATUS FOR DRYING PARTS AND MICROELECTRONIC COMPONENTS, INCLUDING INTEGRATED CIRCUIT WAFERS USING SONIC CREATED MIST
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Patent #:
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|
Issue Dt:
|
11/11/1997
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Application #:
|
08616165
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Filing Dt:
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03/14/1996
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Title:
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METHOD AND APPARATUS FOR DRYING OBJECTS USING AEROSOLS
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Patent #:
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Issue Dt:
|
06/09/1998
|
Application #:
|
08632457
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Filing Dt:
|
04/19/1996
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|
Title:
|
GRIPPER FOR DISK-SHAPED ARTICLES
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|
Patent #:
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|
Issue Dt:
|
03/14/2000
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Application #:
|
08850272
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Filing Dt:
|
05/02/1997
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|
Title:
|
A METHOD FOR REMOVING CHEMICAL RESIDUES FROM A SURFACE
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|
Patent #:
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|
Issue Dt:
|
06/08/1999
|
Application #:
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08879576
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Filing Dt:
|
06/20/1997
|
|
Title:
|
CHEMICAL BATH APPARATUS
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|
Patent #:
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|
Issue Dt:
|
01/25/2000
|
Application #:
|
08942540
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Filing Dt:
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10/01/1997
|
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Title:
|
PROCESS AND DEVICE FOR DRYING OF SUBSTRATES
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|
|
|
|
Patent #:
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|
Issue Dt:
|
04/27/1999
|
Application #:
|
08971754
|
Filing Dt:
|
11/17/1997
|
|
Title:
|
SUPPORT FOR WAFER-LIKE OBJECTS
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|
|
|
|
Patent #:
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|
Issue Dt:
|
02/08/2000
|
Application #:
|
08981930
|
Filing Dt:
|
02/18/1998
|
|
Title:
|
SUPPORT FOR WAFER-SHAPED OBJECTS, IN PARTICULAR SILICON WAFERS
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|
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|
Patent #:
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|
Issue Dt:
|
10/12/1999
|
Application #:
|
08984413
|
Filing Dt:
|
12/03/1997
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|
Title:
|
METHODS FOR DRYING AND CLEANING OBJECTS USING AEROSOLS
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Patent #:
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|
Issue Dt:
|
11/02/1999
|
Application #:
|
09034369
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Filing Dt:
|
03/03/1998
|
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Title:
|
CHEMICAL DRYING AND CLEANING SYSTEM
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|
Patent #:
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|
Issue Dt:
|
11/21/2000
|
Application #:
|
09038288
|
Filing Dt:
|
03/11/1998
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Title:
|
PROCESS AND DEVICE FOR ONE-SIDED TREATMENT OF DISKSHAPED OBJECTS
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|
Patent #:
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Issue Dt:
|
02/27/2001
|
Application #:
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09079455
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Filing Dt:
|
05/15/1998
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Title:
|
ARRANGEMENT FOR TREATMENT OF WAFER-SHAPED ARTICLES, PARTICULARLY SILICON WAFERS
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Patent #:
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Issue Dt:
|
05/18/1999
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Application #:
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09080236
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Filing Dt:
|
05/18/1998
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Title:
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NRRANGEMENT FOR TREATMENT OF WAFER-SHAPED ARTICLES, PARTICULARLY SILICON WAFERS
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Patent #:
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Issue Dt:
|
10/19/1999
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Application #:
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09090453
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Filing Dt:
|
06/04/1998
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Title:
|
METHODS FOR DRYING AND CLEANING OF OBJECTS USING AEROSOLS AND INERT GASES
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Patent #:
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Issue Dt:
|
08/03/1999
|
Application #:
|
09093187
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Filing Dt:
|
06/08/1998
|
|
Title:
|
GRIPPER FOR WAFER-SHAPED ARTICLES
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|
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|
Patent #:
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|
Issue Dt:
|
05/02/2000
|
Application #:
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09098507
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Filing Dt:
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06/17/1998
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Title:
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ROTARY CHUCK INCLUDING PINS FOR LIFTING WAFERS
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Patent #:
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Issue Dt:
|
09/19/2000
|
Application #:
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09109460
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Filing Dt:
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07/02/1998
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Title:
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CHEMICAL DRYING AND CLEANING SYSTEM
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|
Patent #:
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Issue Dt:
|
05/02/2000
|
Application #:
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09156598
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Filing Dt:
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09/18/1998
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Title:
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APPARATUS FOR PREVENTING DRIPPING FROM CONDUIT OPENINGS
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Patent #:
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Issue Dt:
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11/28/2000
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Application #:
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09211414
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Filing Dt:
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12/15/1998
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Title:
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CONVEYING DEVICE FOR THIN DISK-LIKE ARTICLES
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Patent #:
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Issue Dt:
|
12/19/2000
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Application #:
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09248094
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Filing Dt:
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02/11/1999
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Title:
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PROCESS FOR WET ETCHING OF SEMICONDUCTOR WAFERS
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Patent #:
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Issue Dt:
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01/02/2001
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Application #:
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09251288
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Filing Dt:
|
02/17/1999
|
|
Title:
|
METHOD FOR ROUGH-ETICHING A SEMICONDUCTOR SURFACE
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Patent #:
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Issue Dt:
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01/30/2001
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Application #:
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09371296
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Filing Dt:
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08/09/1999
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Title:
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METAL DEPOSIT PROCESS
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Patent #:
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Issue Dt:
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08/07/2001
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Application #:
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09417203
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Filing Dt:
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10/11/1999
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Title:
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APPARATUES FOR DRYING AND CLEANING OBJECTS USING CONTROLLED AEROSOLS AND GASES
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Patent #:
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Issue Dt:
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12/17/2002
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Application #:
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09442190
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Filing Dt:
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11/16/1999
|
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Title:
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DEVICE FOR WET ETCHING AN EDGE OF A SEMICONDUCTOR DISK
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Patent #:
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Issue Dt:
|
12/11/2001
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Application #:
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09484873
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Filing Dt:
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01/18/2000
|
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Title:
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Device for an etch treatment of a disk-like object
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Patent #:
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Issue Dt:
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11/13/2001
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Application #:
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09537705
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Filing Dt:
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03/30/2000
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Title:
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PROCESS AND DEVICE FOR HANDLING DISK-LIKE OBJECTS, ESPECIALLY SILICON WAFERS
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Patent #:
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Issue Dt:
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05/07/2002
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Application #:
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09542337
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Filing Dt:
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04/05/2000
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Title:
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DEVICE FOR DISCHARGING TWO OR MORE MEDIA WITH MEDIA NOZZLES
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Patent #:
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Issue Dt:
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08/20/2002
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Application #:
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09556426
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Filing Dt:
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04/24/2000
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Title:
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DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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Patent #:
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Issue Dt:
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05/14/2002
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Application #:
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09586762
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Filing Dt:
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06/05/2000
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Title:
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PROCESS AND DEVICE FOR DRYING DISK-LIKE OBJECTS
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Patent #:
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09/13/2005
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09614485
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07/10/2000
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Title:
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METHOD AND DEVICE FOR MEASURING CAVITATION
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Patent #:
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09/30/2003
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Application #:
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09617500
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07/17/2000
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Title:
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PROCESS FOR TREATING SEMICONDUCTOR SUBSTRATES
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Patent #:
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07/18/2006
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09774303
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01/29/2001
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Publication #:
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Pub Dt:
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09/06/2001
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Title:
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METAL DEPOSIT PROCESS
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Patent #:
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03/25/2003
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09846049
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05/01/2001
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Publication #:
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01/10/2002
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Title:
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DEVICE FOR TREATING A DISC-SHAPED OBJECT
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Patent #:
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02/06/2007
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09984707
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10/31/2001
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Publication #:
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Pub Dt:
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05/02/2002
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Title:
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DEVICE FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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Patent #:
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02/20/2007
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10143904
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05/14/2002
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Publication #:
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Pub Dt:
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05/08/2003
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Title:
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PROCESS FOR PLANARIZING SUBSTRATES OF SEMICONDUCTOR TECHNOLOGY
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02/22/2005
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10164424
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06/10/2002
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10/17/2002
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Title:
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DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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Patent #:
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05/30/2006
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10235316
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09/05/2002
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03/27/2003
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Title:
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ANNULAR RECEPTACLE FOR A ROTATING CARRIER
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10/09/2007
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10506473
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09/03/2004
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07/14/2005
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Title:
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METHOD FOR THE WET TREATMENT OF DISK-LIKE OBJECTS
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10/17/2006
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10518517
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12/21/2004
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10/13/2005
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Title:
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DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS
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09/18/2007
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10531419
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04/15/2005
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01/12/2006
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DEVICE AND METHOD FOR TRANSPORTING WAFER-SHAPED ARTICLES
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11/23/2010
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10549620
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12/04/2006
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08/02/2007
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Title:
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DEVICE AND METHOD FOR WET TREATING DISC-SHAPED ARTICLES
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09/11/2012
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10560812
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12/15/2005
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Pub Dt:
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07/13/2006
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Title:
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DEVICE AND METHOD FOR WET TREATING DISC-LIKE SUBSTRATES
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Patent #:
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NONE
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10588766
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08/08/2006
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Publication #:
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07/12/2007
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Title:
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Method for selective etching
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03/07/2006
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10632962
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08/04/2003
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02/05/2004
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DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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09/21/2010
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10929568
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08/31/2004
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02/03/2005
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Title:
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DEVICE FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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02/27/2007
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11075872
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03/09/2005
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11/24/2005
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Title:
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WAFER DRYER AND METHOD FOR DRYING A WAFER
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06/06/2006
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11185544
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07/19/2005
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11/17/2005
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Title:
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METHOD AND DEVICE FOR MEASURING CAVITATION
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09/11/2007
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11367330
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03/06/2006
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07/06/2006
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Title:
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DEVICE AND PROCESS FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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08/02/2011
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11584652
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10/23/2006
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04/19/2007
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Title:
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DEVICE FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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Patent #:
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08/05/2014
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11662092
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03/07/2007
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02/14/2008
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Title:
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NONE
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11667698
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05/14/2007
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12/27/2007
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Title:
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Apparatus and Method For Wet Treatment of Wafers
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NONE
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11791953
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05/31/2007
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01/17/2008
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Apparatus And Method For Drying Disk-Shaped Substrates
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07/13/2010
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10/05/2007
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02/26/2009
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Title:
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METHOD FOR REMOVING PARTICLES FROM A SEMICONDUCTOR SURFACE
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10/18/2011
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11914315
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11/13/2007
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08/14/2008
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Title:
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METHOD FOR DRYING A SURFACE
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10/04/2011
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11915352
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11/23/2007
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08/21/2008
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DEVICE AND METHOD FOR LIQUID TREATMENT OF WAFER-SHAPED ARTICLES
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04/03/2012
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12280559
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08/25/2008
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01/01/2009
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DEVICE AND METHOD FOR LIQUID TREATING DISC-LIKE ARTICLES
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03/10/2015
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12281795
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09/05/2008
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03/26/2009
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DEVICE FOR FLUID TREATING PLATE-LIKE ARTICLES
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NONE
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12299647
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11/05/2008
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Pub Dt:
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09/24/2009
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DEVICE AND METHOD FOR WET TREATING PLATE-LIKE SUBSTRATES
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07/31/2012
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12519232
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06/15/2009
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Pub Dt:
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03/10/2011
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Title:
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DEVICE AND METHOD FOR WET TREATING PLATE-LIKE-ARTICLES
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Patent #:
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01/13/2015
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12523759
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07/20/2009
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Publication #:
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Pub Dt:
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01/21/2010
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Title:
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METHOD FOR CLEANING A SURFACE
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