Patent Assignment Details
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Reel/Frame: | 023274/0080 | |
| Pages: | 4 |
| | Recorded: | 09/23/2009 | | |
Attorney Dkt #: | 033082M621 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/27/2012
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Application #:
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12532743
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Filing Dt:
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09/23/2009
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Publication #:
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Pub Dt:
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03/04/2010
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Title:
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METHOD FOR FORMING SILICON NITRIDE FILM, METHOD FOR MANUFACTURING NONVOLATILE SEMICONDUCTOR MEMORY DEVICE, NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND PLASMA APPARATUS
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Assignee
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3-1, AKASAKA 5-CHOME, MINATO-KU |
TOKYO-TO, JAPAN |
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Correspondence name and address
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MICHAEL A. MAKUCH
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1130 CONNECTICUT AVENUE, N.W.,SUITE 1130
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SMITH, GAMBRELL & RUSSELL, LLP
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WASHINGTON, DC 20036
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