Patent Assignment Details
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Reel/Frame: | 023531/0519 | |
| Pages: | 2 |
| | Recorded: | 11/17/2009 | | |
Attorney Dkt #: | LAM1P297/P1976 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/11/2012
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Application #:
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12620335
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Filing Dt:
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11/17/2009
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Publication #:
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Pub Dt:
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05/19/2011
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Title:
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METHOD FOR REDUCING LINE WIDTH ROUGHNESS WITH PLASMA PRE-ETCH TREATMENT ON PHOTORESIST
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Assignee
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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Correspondence name and address
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BEYER LAW GROUP LLP
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P.O BOX 1687
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CUPERTINO, CA 95015
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