Patent Assignment Details
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| Reel/Frame: | 023614/0218 | |
| Pages: | 6 |
| | Recorded: | 12/07/2009 | | |
| Attorney Dkt #: | 24609-0023US1 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/28/2012
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Application #:
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12518968
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Filing Dt:
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12/16/2009
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Publication #:
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Pub Dt:
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08/25/2011
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Title:
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DEVICE AND METHOD FOR MEASURING LITHOGRAPHY MASKS
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Assignee
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| CARL-ZEISS-PROMENADE 10 |
| JENA, GERMANY D-07745 |
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Correspondence name and address
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MARC M. WEFERS
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FISH & RICHARDSON P.C.
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P.O.BOX 1022
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MINNEAPOLIS, MN 55440-1022
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