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Reel/Frame:023619/0276   Pages: 3
Recorded: 12/08/2009
Attorney Dkt #:1015-0064
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12597637
Filing Dt:
12/08/2009
Publication #:
Pub Dt:
06/03/2010
Title:
DRY ETCHING APPARATUS AND DRY ETCHING METHOD
Assignors
1
Exec Dt:
11/27/2009
2
Exec Dt:
11/27/2009
3
Exec Dt:
12/01/2009
Assignee
1
2500 HAGISONO, CHIGASAKI
KANAGAWA, JAPAN 253-8543
Correspondence name and address
TOMOKO NAKAJIMA
515 EAST BRADDOCK RD
ALEXANDRIA, VA 22314

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