Patent Assignment Details
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| Reel/Frame: | 023717/0372 | |
| Pages: | 4 |
| | Recorded: | 12/30/2009 | | |
| Attorney Dkt #: | MLSE 1089-2 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/29/2011
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Application #:
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12604317
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Filing Dt:
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10/22/2009
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Publication #:
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Pub Dt:
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04/22/2010
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Title:
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METHOD OF ITERATIVE COMPENSATION FOR NON-LINEAR EFFECTS IN THREE-DIMENSIONAL EXPOSURE OF RESIST
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Assignee
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| NYTORPSVAGEN 9 |
| TABY, SWEDEN S-183 03 |
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Correspondence name and address
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HAYNES BEFFEL & WOLFELD LLP/EJB
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PO BOX 366
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HALF MOON BAY, CA 94019
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