|
Total properties:
17
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/25/2004
|
Application #:
|
09950437
|
Filing Dt:
|
09/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2002
| | | | |
|
Title:
|
WAFER CLEANING APPARATUS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2004
|
Application #:
|
10033950
|
Filing Dt:
|
12/28/2001
|
|
Publication #:
|
|
Pub Dt:
|
07/11/2002
| | | | |
|
Title:
|
APPARATUS FOR MONITORING INTENTIONAL OR UNAVOIDABLE LAYER DEPOSITIONS AND METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/08/2004
|
Application #:
|
10090259
|
Filing Dt:
|
03/04/2002
|
|
Publication #:
|
|
Pub Dt:
|
10/24/2002
| | | | |
|
Title:
|
SELF-SUPPORTING ADAPTABLE METROLOGY DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
08/31/2004
|
Application #:
|
10166963
|
Filing Dt:
|
06/11/2002
|
|
Publication #:
|
|
Pub Dt:
|
12/12/2002
| | | | |
|
Title:
|
SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT AND METHOD FOR MANUFACTURING THE DEVICE
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/14/2004
|
Application #:
|
10185630
|
Filing Dt:
|
06/28/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/09/2003
| | | | |
|
Title:
|
LIGHT CURTAIN SYSTEM FOR ESTABLISHING A PROTECTIVE LIGHT CURTAIN, TOOL AND SYSTEM FOR PROCESSING OBJECTS AND METHOD FOR LOADING/UNLOADING A TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
|
Application #:
|
10186970
|
Filing Dt:
|
07/01/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/02/2003
| | | | |
|
Title:
|
WAFER HANDLING SYSTEM AND WAFER HANDLING METHOD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/19/2004
|
Application #:
|
10190097
|
Filing Dt:
|
07/03/2002
|
|
Publication #:
|
|
Pub Dt:
|
01/09/2003
| | | | |
|
Title:
|
METHOD FOR ADJUSTING A TEMPERATURE IN A RESIST PROCESS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
06/21/2005
|
Application #:
|
10368073
|
Filing Dt:
|
02/18/2003
|
|
Publication #:
|
|
Pub Dt:
|
07/31/2003
| | | | |
|
Title:
|
METHOD FOR WAFER POSITION DATA RETRIEVAL IN SEMICONDUCTOR WAFER MANUFACTURING
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
02/22/2005
|
Application #:
|
10401193
|
Filing Dt:
|
03/27/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/25/2003
| | | | |
|
Title:
|
VEHICLE FOR TRANSPORTING A SEMICONDUCTOR DEVICE CARRIER TO A SEMICONDUCTOR PROCESSING TOOL
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/30/2004
|
Application #:
|
10403880
|
Filing Dt:
|
03/31/2003
|
|
Publication #:
|
|
Pub Dt:
|
09/25/2003
| | | | |
|
Title:
|
CONFIGURATION FOR POLISHING DISK-SHAPED OBJECTS
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
04/12/2005
|
Application #:
|
10424174
|
Filing Dt:
|
04/25/2003
|
|
Publication #:
|
|
Pub Dt:
|
10/09/2003
| | | | |
|
Title:
|
CONFIGURATION FOR TRANSPORTING A SEMICONDUCTOR WAFER CARRIER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2005
|
Application #:
|
10435449
|
Filing Dt:
|
05/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
02/12/2004
| | | | |
|
Title:
|
METHOD FOR EXPOSING A SEMICONDUCTOR WAFER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
09/21/2004
|
Application #:
|
10457706
|
Filing Dt:
|
06/09/2003
|
|
Publication #:
|
|
Pub Dt:
|
02/19/2004
| | | | |
|
Title:
|
APPARATUS AND METHOD FOR DETECTING AN AMOUNT OF DEPOLARIZATION OF A LINEARLY POLARIZED BEAM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/02/2007
|
Application #:
|
10462422
|
Filing Dt:
|
06/16/2003
|
|
Publication #:
|
|
Pub Dt:
|
04/07/2005
| | | | |
|
Title:
|
CONFIGURATION AND METHOD FOR MOUNTING A BACKING FILM TO A POLISH HEAD
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/03/2005
|
Application #:
|
10601639
|
Filing Dt:
|
06/23/2003
|
|
Title:
|
SEMICONDUCTOR PRODUCT CONTAINER AND SYSTEM FOR HANDLING A SEMICONDUCTOR PRODUCT CONTAINER
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
10/12/2004
|
Application #:
|
10685062
|
Filing Dt:
|
10/14/2003
|
|
Publication #:
|
|
Pub Dt:
|
08/12/2004
| | | | |
|
Title:
|
HEATING SYSTEM, METHOD FOR HEATING A DEPOSITION OR OXIDATION REACTOR, AND REACTOR INCLUDING THE HEATING SYSTEM
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
03/15/2005
|
Application #:
|
10816142
|
Filing Dt:
|
04/02/2004
|
|
Publication #:
|
|
Pub Dt:
|
12/02/2004
| | | | |
|
Title:
|
SEMICONDUCTOR DEVICE IDENTIFICATION APPARATUS
|
|
