Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 023918/0567 | |
| Pages: | 4 |
| | Recorded: | 02/09/2010 | | |
| Attorney Dkt #: | 13671USA/ETCH/CHMBR/MDD |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/20/2012
|
Application #:
|
12623243
|
Filing Dt:
|
11/20/2009
|
|
Publication #:
|
|
Pub Dt:
|
06/03/2010
| | | | |
|
Title:
|
EFFICIENT AND ACCURATE METHOD FOR REAL-TIME PREDICTION OF THE SELF-BIAS VOLTAGE OF A WAFER AND FEEDBACK CONTROL OF ESC VOLTAGE IN PLASMA PROCESSING CHAMBER
|
|
|
Assignee
|
|
|
|
|
| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
|
|
Correspondence name and address
|
| |
PAULINE S. FISCHER
|
| |
APPLIED MATERIALS, INC.
|
| |
P.O. BOX 450 A
|
| |
SANTA CLARA, CA 95052
|
Search Results as of:
05/05/2024 02:24 AM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
